A versatile reactor is described which enables nonequilibrium plasma and/or vapor phase chemical modification of surfaces in an inert reaction volume, and features sample transfer to a surface analytical chamber through high vacuum. Separate, specialized reaction chambers may be interchanged to optimally perform a wide variety of experiments such as high temperature catalysis or plasma deposition studies. The reactor body and the reaction chamber designed for plasma and chemical surface modification are described, with emphasis on the considerations involved in their design. Data from two types of experiments which demonstrate the capabilities of the reactor, covalent modification of SiO2 with organosilyl species, and O2 plasma etching of polystyrene, are presented and interpreted.
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July 1985
Research Article|
July 01 1985
A versatile reactor for ultrahigh vacuum surface modification studies based on a reusable metal sealing system
Todd R. Hayes;
Todd R. Hayes
Department of Chemistry, University of Minnesota, Minneapolis, Minnesota 55455
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John F. Evans;
John F. Evans
Department of Chemistry, University of Minnesota, Minneapolis, Minnesota 55455
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Thomas W. Rusch
Thomas W. Rusch
Physical Electronics Division, Perkin–Elmer Corporation, Eden Prairie, Minnesota 55344
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J. Vac. Sci. Technol. A 3, 1768–1773 (1985)
Article history
Received:
June 22 1984
Accepted:
March 25 1985
Citation
Todd R. Hayes, John F. Evans, Thomas W. Rusch; A versatile reactor for ultrahigh vacuum surface modification studies based on a reusable metal sealing system. J. Vac. Sci. Technol. A 1 July 1985; 3 (4): 1768–1773. https://doi.org/10.1116/1.573376
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