We have extended cathodoluminescence spectroscopy (CLS) to the study of new compound and defect formation at metal–semiconductor interfaces. CLS provides evidence for Cu2S and/or impurity band formation after laser annealing Cu on UHV‐cleaved CdS. Al deposition on UHV‐cleaved CdS followed by laser annealing leads to formation of at least two deep levels distributed at different depths from the initial interface. The energies, densities, and spatial distribution of these levels depend sensitively on the laser intensity and the presence or absence of particular metal overlayers. These results demonstrate the utility of CLS in revealing electronic features of the buried metal–semiconductor interface while still maintaining depth resolution on the order of hundreds of Å or less.
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May 1985
Research Article|
May 01 1985
Cathodoluminescence spectroscopy studies of laser‐annealed metal–semiconductor interfaces Available to Purchase
L. J. Brillson;
L. J. Brillson
Xerox Webster Research Center, Webster, New York 14580
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H. W. Richter;
H. W. Richter
Xerox Webster Research Center, Webster, New York 14580
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M. L. Slade;
M. L. Slade
Xerox Webster Research Center, Webster, New York 14580
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B. A. Weinstein;
B. A. Weinstein
Xerox Webster Research Center, Webster, New York 14580
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Y. Shapira
Y. Shapira
Xerox Webster Research Center, Webster, New York 14580
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L. J. Brillson
Xerox Webster Research Center, Webster, New York 14580
H. W. Richter
Xerox Webster Research Center, Webster, New York 14580
M. L. Slade
Xerox Webster Research Center, Webster, New York 14580
B. A. Weinstein
Xerox Webster Research Center, Webster, New York 14580
Y. Shapira
Xerox Webster Research Center, Webster, New York 14580
J. Vac. Sci. Technol. A 3, 1011–1015 (1985)
Article history
Received:
October 08 1984
Accepted:
November 06 1984
Citation
L. J. Brillson, H. W. Richter, M. L. Slade, B. A. Weinstein, Y. Shapira; Cathodoluminescence spectroscopy studies of laser‐annealed metal–semiconductor interfaces. J. Vac. Sci. Technol. A 1 May 1985; 3 (3): 1011–1015. https://doi.org/10.1116/1.573110
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