Nanolaminate films with a nominal 5 nm –4 nm bilayer architecture are sputter deposited on unheated fused silica and Au-coated glass substrates. Films on fused silica are postdeposition annealed from 573 to 1273 K and characterized by x-ray diffraction, scanning electron microscopy, Raman microscopy, and UV-visible-near IR spectrophotometry. The films show weak but progressive crystallization into orthorhombic when annealed up to 973 K. is expected to form under bulk thermodynamic equilibrium conditions in the case of complete mixing of the bilayer components. Annealing above 973 K produces a crystallization sequence that is not predicted by bulk thermodynamics, ultimately involving demixing to form monoclinic doped with Ti and rutile doped with Hf. These phases have a higher atomic density than and segregate into discrete mesoscopic features. The authors propose that demixing into higher density phases is a mechanism for thermal stress relief at high temperature. Demixing results in a major loss of optical transparency in the visible and ultraviolet spectral regions.
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September 2010
Research Article|
September 03 2010
Crystallization, metastable phases, and demixing in a hafnia-titania nanolaminate annealed at high temperature
Massiel Cristina Cisneros-Morales;
Massiel Cristina Cisneros-Morales
Department of Chemistry and Biochemistry,
University of Wisconsin-Milwaukee
, P.O. Box 413, Milwaukee, Wisconsin 53201
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Carolyn Rubin Aita
Carolyn Rubin Aita
a)
Department of Chemistry and Biochemistry,
University of Wisconsin-Milwaukee
, P.O. Box 413, Milwaukee, Wisconsin 53201
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a)
Author to whom correspondence should be addressed; electronic mail: [email protected]
J. Vac. Sci. Technol. A 28, 1161–1168 (2010)
Article history
Received:
May 20 2010
Accepted:
July 12 2010
Citation
Massiel Cristina Cisneros-Morales, Carolyn Rubin Aita; Crystallization, metastable phases, and demixing in a hafnia-titania nanolaminate annealed at high temperature. J. Vac. Sci. Technol. A 1 September 2010; 28 (5): 1161–1168. https://doi.org/10.1116/1.3474973
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