It is important to evaluate the internal energy of the sputtered neutral particles to optimize their resonant ionization efficiency. In this study, the internal energy of the sputtered Al atom, especially the ground state and the lowest-lying excited state , was monitored by using resonant laser postionization sputtered neutral mass spectrometry. The results of the authors showed the density of the ground state of the sputtered Al atom drastically decreased due to surface oxidation, as well as the enhancement of the secondary yield.
REFERENCES
1.
M. L.
Yu
, Sputtering by Particles Bombardment III
(Springer-Verlag
, Berlin
, 1991
), p. 91
.2.
C. E.
Young
, W. F.
Calaway
, M. J.
Pellin
, and D. M.
Gruen
, J. Vac. Sci. Technol. A
2
, 693
(1984
).3.
F. M.
Kimock
, D. L.
Pappas
, and N.
Winograd
, Anal. Chem.
57
, 2669
(1985
).4.
N.
Kubota
and S.
Hayashi
, Appl. Surf. Sci.
255
, 1516
(2008
).5.
S.
Hayashi
and N.
Kubota
, Appl. Surf. Sci.
255
, 834
(2008
).6.
7.
J. F.
Ziegler
, J. P.
Biersack
, and U.
Littmark
, The Stopping Range of Ions in Matter
(Pergamon
, New York
, 1985
), Vol. 1
.8.
W.
Eckstein
, Computer Simulation of Ion Solid Interactions
(Springer
, Berlin, Heidelberg
, 1991
).9.
H.
Gnaser
, Phys. Rev. B
54
, 17141
(1996
).10.
M.
Ishida
, T.
Higashiyama
, Y.
Matsumoto
, and K.
Honma
, J. Chem. Phys.
122
, 204312
(2005
).© 2009 American Vacuum Society.
2009
American Vacuum Society
You do not currently have access to this content.