The electrospray droplet impact (EDI), in which the charged electrospray water droplets are introduced in vacuum, accelerated, and allowed to impact the sample, is applied to polymethylmetacrylate (PMMA). The secondary ions generated were measured by an orthogonal time-of-flight mass spectrometer. In EDI mass spectra for PMMA, fragment ions originating from PMMA could not be detected. This is due to the fact that the proton affinities of fragments formed from PMMA are smaller than those from acetic acid contained in the charged droplet. The x-ray photoelectron spectroscopy spectra of PMMA irradiated by water droplets did not change with prolonged cluster irradiation, i.e., EDI is capable of shallow surface etching for PMMA with a little damage of the sample underneath the surface.
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July 2009
Research Article|
June 29 2009
Surface characterization of polymethylmetacrylate bombarded by charged water droplets
Kenzo Hiraoka;
Kenzo Hiraoka
a)
Clean Energy Research Center,
University of Yamanashi
, Takeda-4, Kofu 400-8511, Japan
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Riou Takaishi;
Riou Takaishi
Clean Energy Research Center,
University of Yamanashi
, Takeda-4, Kofu 400-8511, Japan
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Daiki Asakawa;
Daiki Asakawa
Clean Energy Research Center,
University of Yamanashi
, Takeda-4, Kofu 400-8511, Japan
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Yuji Sakai;
Yuji Sakai
Japan Science and Technology Agency
, Naka-ku, Hamamatsu 432-8561, Japan
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Yoshitoki Iijima
Yoshitoki Iijima
Electron Optics Sales Division,
JEOL Ltd.
, 2-8-3 Akebono, Tachikawa, Tokyo 190-0012, Japan
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a)
Author to whom correspondence should be addressed; electronic mail: hiraoka@yamanashi.ac.jp
J. Vac. Sci. Technol. A 27, 748–753 (2009)
Article history
Received:
October 02 2008
Accepted:
February 23 2009
Citation
Kenzo Hiraoka, Riou Takaishi, Daiki Asakawa, Yuji Sakai, Yoshitoki Iijima; Surface characterization of polymethylmetacrylate bombarded by charged water droplets. J. Vac. Sci. Technol. A 1 July 2009; 27 (4): 748–753. https://doi.org/10.1116/1.3100219
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