The electrospray droplet impact (EDI), in which the charged electrospray water droplets are introduced in vacuum, accelerated, and allowed to impact the sample, is applied to polymethylmetacrylate (PMMA). The secondary ions generated were measured by an orthogonal time-of-flight mass spectrometer. In EDI mass spectra for PMMA, fragment ions originating from PMMA could not be detected. This is due to the fact that the proton affinities of fragments formed from PMMA are smaller than those from acetic acid contained in the charged droplet. The x-ray photoelectron spectroscopy spectra of PMMA irradiated by water droplets did not change with prolonged cluster irradiation, i.e., EDI is capable of shallow surface etching for PMMA with a little damage of the sample underneath the surface.

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