The fabrication of a membrane supported long-range surface plasmon polariton waveguide for use as a biosensor is described. This type of device can be completely immersed in the sensing environments to create symmetrical waveguide surroundings. The membrane is created from the fluoropolymer CYTOP which has strong physical properties and a low index of refraction. The fabrication steps of this device are described along with examples of completed structures.

Topics
Plasmons, Dielectric materials, Etching, Polymers, Thin films, Optical properties, Nitrides, Transition metals, Chemical elements, Biosensors
© 2009 American Vacuum Society.
2009
American Vacuum Society
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