The effects of bias voltage on the microstructure and the related tribological properties of nanoscale multilayer superlattice coatings were investigated. The coatings were deposited at substrate temperature by combined high power impulse magnetron sputtering (HIPIMS) and unbalanced magnetron sputtering techniques. The substrates were 304 stainless steel, M2 high speed steel for structural analysis and mechanical testing, as well as cemented carbide substrates end mills for dry high speed milling applications. Substrates were pretreated by HIPIMS etching. The bias voltage was varied between and . The chemical composition was determined by neutral mass spectroscopy. The microstructure was characterized by x-ray diffraction and cross sectional transmission electron microscopy. All coatings had a single phase fcc structure. The chemical composition was not affected by the bias voltage. Local epitaxial or axiotaxial growth attributed to the HIPIMS etching pretreatment was observed on the large surface areas of the substrate crystals. This turned to columnar growth with {110} texture at low bias voltages between and , while at an equiaxed structure of large crystal sizes developed with {111} texture. At the same time the waviness of the superlattice significantly decreased. An increase in bias voltage resulted in a significant rise in both residual stress levels (from ) and plastic hardness (from ), while the coating/substrate adhesion decreased from . The friction coefficient increased from 0.43 (at ) to 0.55 (at ), while the initial sliding wear rates decreased remarkably ( at to at ). The life time of ball-nosed cemented carbide end mills decreased from at to when was raised to . These results highlight that the combination of HIPIMS substrate treatment and designed deposition parameters provides good opportunity to tailor coating structures with optimized properties.
Skip Nav Destination
Article navigation
March 2009
Research Article|
February 06 2009
Influence of the bias voltage on the structure and mechanical performance of nanoscale multilayer physical vapor deposition coatings
G. Sáfrán;
G. Sáfrán
a)
Research Institute for Technical Physics and Materials Science
, Hungarian Academy of Sciences, Konkoly Thege 29-33, 1121 Budapest, Hungary
Search for other works by this author on:
C. Reinhard;
C. Reinhard
Nanotechnology Centre for PVD Research,
Materials and Engineering Research Institute
, Sheffield Hallam University, Howard St., Sheffield, S1 1WB, United Kingdom
Search for other works by this author on:
A. P. Ehiasarian;
A. P. Ehiasarian
Nanotechnology Centre for PVD Research,
Materials and Engineering Research Institute
, Sheffield Hallam University, Howard St., Sheffield, S1 1WB, United Kingdom
Search for other works by this author on:
P. B. Barna;
P. B. Barna
Research Institute for Technical Physics and Materials Science
, Hungarian Academy of Sciences, Konkoly Thege 29-33, 1121 Budapest, Hungary
Search for other works by this author on:
L. Székely;
L. Székely
Research Institute for Technical Physics and Materials Science
, Hungarian Academy of Sciences, Konkoly Thege 29-33, 1121 Budapest, Hungary
Search for other works by this author on:
O. Geszti;
O. Geszti
Research Institute for Technical Physics and Materials Science
, Hungarian Academy of Sciences, Konkoly Thege 29-33, 1121 Budapest, Hungary
Search for other works by this author on:
P. Eh. Hovsepian
P. Eh. Hovsepian
Nanotechnology Centre for PVD Research, Materials and Engineering Research Institute,
Sheffield Hallam University
, Howard St., Sheffield S1 1WB, United Kingdom
Search for other works by this author on:
a)
Author to whom correspondence should be addressed; Tel.: +36 1 392 2222; electronic mail: safran@mfa.kfki.hu
J. Vac. Sci. Technol. A 27, 174–182 (2009)
Article history
Received:
July 08 2008
Accepted:
December 08 2008
Citation
G. Sáfrán, C. Reinhard, A. P. Ehiasarian, P. B. Barna, L. Székely, O. Geszti, P. Eh. Hovsepian; Influence of the bias voltage on the structure and mechanical performance of nanoscale multilayer physical vapor deposition coatings. J. Vac. Sci. Technol. A 1 March 2009; 27 (2): 174–182. https://doi.org/10.1116/1.3065675
Download citation file:
Sign in
Don't already have an account? Register
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Sign in via your Institution
Sign in via your InstitutionPay-Per-View Access
$40.00
Citing articles via
Related Content
Interface microstructure engineering by high power impulse magnetron sputtering for the enhancement of adhesion
J. Appl. Phys. (March 2007)
Epitaxial to axiotaxial texture evolution in endotaxial MnP films grown on GaP (100)
Journal of Vacuum Science & Technology A (April 2020)
Axiotaxy of CoSi 2 thin films on Si(100) substrates and the effects of Ti alloying
Journal of Applied Physics (June 2004)
Reactive HiPIMS deposition of SiO2/Ta2O5 optical interference filters
J. Appl. Phys. (December 2014)
The influence of superimposed DC current on electrical and spectroscopic characteristics of HiPIMS discharge
AIP Advances (January 2018)