Optimization of electrostatic lens systems for low-energy scanning microcolumn applications

The optimization of a low-energy scanning microcolumn is proposed by adopting a modified Einzel lens sandwiched between an aligner and a deflector. The modified Einzel lens is composed of four electrodes, and the two center electrodes are specially designed quadrupole lenses having keyhole type rather than circular apertures. The outer electrodes of the Einzel lens having circular apertures are grounded, and the quadrupole lens is operated by applying the quadrupole voltages. The effects of the separated deflector system and the static quadrupole lens were investigated by analyzing the scanning electron beam spot at the target, and the results show that the proposed system can improve the performance of the scanning microcolumn.