Lead zirconate titanate (PZT) is a desirable material for nonvolatile data storage due to its ferroelectric properties. Evaluating the nanoscale mechanical and tribological performance of PZT is crucial in understanding the reliability of this material. To this end, the mechanical properties of the PZT film were characterized by nanoindentation. Nanoscratch studies reveal that the PZT film is removed by a combination of plastic deformation and brittle failure. The adhesion, friction, and wear properties of PZT were evaluated before and after application of two lubricants, namely, the perfluoropolyether Z-TETRAOL and the ionic liquid 1-butyl-3-methylimidazolium hexafluorophosphate . Wear at ultralow loads was simulated and the lubricant removal mechanism was investigated for the first time using atomic-force-microscopy-based surface potential and contact resistance techniques. From this study, ionic liquids were found to exhibit comparable nanotribological properties with Z-TETRAOL.
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July 2008
Research Article|
June 30 2008
Nanotribological and nanomechanical properties of lubricated PZT thin films for ferroelectric data storage applications
Manuel Palacio;
Manuel Palacio
Nanotribology Laboratory for Information Storage and MEMS/NEMS (NLIM),
The Ohio State University
, 201 W. 19th Ave., Columbus, Ohio 43210
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Bharat Bhushan
Bharat Bhushan
a)
Nanotribology Laboratory for Information Storage and MEMS/NEMS (NLIM),
The Ohio State University
, 201 W. 19th Ave., Columbus, Ohio 43210
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a)
Author to whom correspondence should be addressed; electronic mail: bhushan.2@osu.edu
J. Vac. Sci. Technol. A 26, 768–776 (2008)
Article history
Received:
October 18 2007
Accepted:
January 22 2008
Citation
Manuel Palacio, Bharat Bhushan; Nanotribological and nanomechanical properties of lubricated PZT thin films for ferroelectric data storage applications. J. Vac. Sci. Technol. A 1 July 2008; 26 (4): 768–776. https://doi.org/10.1116/1.2870230
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