The spinning rotor gauge is the most stable device available for measuring pressure between and . The calibration of these gauges is determined by measuring an effective accommodation coefficient, which is used in conjunction with an equation derived from the kinetic theory of gases to calculate the pressure seen by the rotor gauge. To assess the reproducibility of the spinning rotor gauge (and hence its accommodation coefficient), eight spinning rotor gauges were calibrated numerous times simultaneously with the primary midrange vacuum standard at the National Institute of Standards and Technology over a period. Events encountered by a rotor during its normal operation were investigated for their effects on the accommodation coefficient of the rotor. The effects of baking as well as “crashing” of the rotors were also investigated. We found that the accommodation coefficient may be dependent on the orientation of the rotor’s suspension as a consequence of anisotropically distributed blemishes on the rotor’s surface. Consequently, the accommodation coefficient will not reproduce well when the rotor is resuspended because the rotational axis is not replicated. Data on the accommodation coefficient obtained from ordinary rotors as well as rotors specifically prepared with a band of scratches to exaggerate the anisotropic nature of the blemishes will be presented.
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November 2007
Research Article|
October 18 2007
Factors affecting the reproducibility of the accommodation coefficient of the spinning rotor gauge
Ren Fang Chang;
Ren Fang Chang
a)
National Institute of Standards and Technology
, Gaithersburg, Maryland 20899-8364
Search for other works by this author on:
Patrick J. Abbott
Patrick J. Abbott
b)
National Institute of Standards and Technology
, Gaithersburg, Maryland 20899-8364
Search for other works by this author on:
Ren Fang Chang
a)
Patrick J. Abbott
b)
National Institute of Standards and Technology
, Gaithersburg, Maryland 20899-8364a)
Retired.
b)
Electronic mail: [email protected]
J. Vac. Sci. Technol. A 25, 1567–1576 (2007)
Article history
Received:
April 17 2007
Accepted:
September 05 2007
Citation
Ren Fang Chang, Patrick J. Abbott; Factors affecting the reproducibility of the accommodation coefficient of the spinning rotor gauge. J. Vac. Sci. Technol. A 1 November 2007; 25 (6): 1567–1576. https://doi.org/10.1116/1.2790910
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