Ti3SiC2 thin films were synthesized by magnetron sputtering from Ti3SiC2 and Ti targets. Sputtering from a Ti3SiC2 target alone resulted in films with a C content of 50at.% or more, due to gas-phase scattering processes and differences in angular and energy distributions between species ejected from the target. Addition of Ti to the deposition flux from a Ti3SiC2 target is shown to bind the excess C in TiCx intergrown with Ti3SiC2 and Ti4SiC3. Additionally, a substoichiometric TiCx buffer layer is shown to serve as a C sink and enable the growth of Ti3SiC2.

1.
H.
Nowotny
,
Prog. Solid State Chem.
2
,
27
(
1970
).
2.
W.
Jeitschko
and
H.
Nowotny
,
Monatsch. Chem.
98
,
329
(
1967
).
3.
M. W.
Barsoum
and
T.
El-Raghy
,
J. Am. Ceram. Soc.
79
,
1953
(
1996
).
4.
M. W.
Barsoum
,
Prog. Solid State Chem.
28
,
201
(
2000
).
5.
V.
Gauthier
,
B.
Cochepin
,
S.
Dubois
, and
D.
Vrel
,
J. Am. Ceram. Soc.
89
,
2899
(
2006
).
6.
Y.
Zhou
,
H.
Zhang
,
M.
Liu
,
J.
Wang
, and
Y.
Bao
,
Mater. Res. Innovations
8
,
97
(
2004
).
7.
Z. M.
Sun
,
A.
Murugaiah
,
T.
Zhen
,
A.
Zhou
, and
M. W.
Barsoum
,
Acta Mater.
53
,
4359
(
2005
).
8.
B. J.
Kooi
,
R. J.
Poppen
,
N. J. M.
Carvalho
,
J. Th. M.
de Hosson
, and
M. W.
Barsoum
,
Acta Mater.
51
,
2859
(
2003
).
9.
S. L.
Shi
,
W.
Pan
,
M.-H.
Fang
, and
Z.-Y.
Fang
,
Appl. Phys. Lett.
87
,
172902
(
2005
).
10.
P.
Finkel
,
M. W.
Barsoum
,
J. D.
Hettinger
,
S. E.
Lofland
, and
H. I.
Yoo
,
Phys. Rev. B
67
,
235108
(
2003
).
11.
J.
Emmerlich
,
P.
Eklund
,
D.
Rittrich
,
H.
Högberg
, and
L.
Hultman
,
J. Mater. Res.
(in press).
12.
A.
Souchet
,
J.
Fontaine
,
M.
Belin
,
T.
Le Mogne
,
J.-L.
Loubet
, and
M. W.
Barsoum
,
Tribol. Lett.
18
,
341
(
2005
).
13.
D.
Sarkar
,
B.
Basu
,
S. J.
Cho
,
M. C.
Chu
,
S. S.
Hwang
, and
S. W.
Park
,
J. Am. Ceram. Soc.
88
,
3245
(
2005
).
14.
J.
Emmerlich
,
G.
Gassner
,
P.
Eklund
,
H.
Högberg
, and
L.
Hultman
,
Wear
(in press).
15.
H. I.
Yoo
,
M. W.
Barsoum
, and
T.
El-Raghy
,
Nature (London)
407
,
581
(
2000
).
16.
L.
Chaput
,
G.
Hug
,
P.
Pecheur
, and
H.
Scherrer
,
Phys. Rev. B
71
,
121104
(
2005
).
17.
P.
Eklund
,
C.
Virojanadara
,
J.
Emmerlich
,
L. I.
Johansson
,
H.
Högberg
, and
L.
Hultman
,
Phys. Rev. B
74
,
045417
(
2006
).
18.
J.
Emmerlich
,
D.
Music
,
P.
Eklund
,
O.
Wilhelmsson
,
U.
Jansson
,
J. M.
Schneider
,
H.
Högberg
, and
L.
Hultman
,
Acta Mater.
55
,
1479
(
2007
).
19.
Z.
Oo
,
I. M.
Low
, and
B. H.
O’Connor
,
Physica B
385–386
,
499
(
2006
).
20.
P.
Isberg
,
P.
Eklund
,
J.
Emmerlich
,
H.
Högberg
,
L.
Hultman
, and
H.
Ljungcrantz
, International Patent No. WO 2005/038985 A3 (28 April
2005
).
21.
P.
Isberg
,
J.-P.
Palmquist
,
U.
Jansson
,
L.
Hultman
,
J.
Birch
, and
T.
Seppänen
, International Patent No. WO 03/046247 A1 (5 June
2003
).
22.
H. L.
Tuller
,
M. A.
Spears
, and
R.
Mlcak
, US Patent No. US6544674 B2 (8 April
2003
).
23.
B.
Veisz
and
B.
Pécz
,
Appl. Surf. Sci.
233
,
360
(
2004
).
24.
T.
Seppänen
 et al, in
Proceedings of the 53rd Annual Meeting of the Scandinavian Society for Electron Microscopy, Tampere, Finland, 12–15 June 2002
, edited by
J.
Keränen
and
K.
Sillanpää
(
Tampere University
,
Finland
,
2002
), p.
142
.
25.
J.-P.
Palmquist
,
U.
Jansson
,
T.
Seppänen
,
P. O. Å.
Persson
,
J.
Birch
,
L.
Hultman
, and
P.
Isberg
,
Appl. Phys. Lett.
81
,
835
(
2002
).
26.
J.
Emmerlich
 et al,
J. Appl. Phys.
96
,
4817
(
2004
).
27.
J.-P.
Palmquist
 et al,
Phys. Rev. B
70
,
165401
(
2004
).
28.
P.
Eklund
,
A.
Murugaiah
,
J.
Emmerlich
,
Zs.
Czigány
,
J.
Frodelius
,
M. W.
Barsoum
,
H.
Högberg
, and
L.
Hultman
,
J. Cryst. Growth
304
,
264
(
2007
).
29.
H.
Högberg
 et al,
Surf. Coat. Technol.
193
,
6
(
2005
).
30.
H.
Högberg
,
P.
Eklund
,
J.
Emmerlich
,
J.
Birch
, and
L.
Hultman
,
J. Mater. Res.
20
,
779
(
2005
).
31.
O.
Wilhelmsson
,
J.-P.
Palmquist
,
T.
Nyberg
, and
U.
Jansson
,
Appl. Phys. Lett.
85
,
1066
(
2004
).
32.
O.
Wilhelmsson
 et al,
J. Cryst. Growth
291
,
290
(
2006
).
33.
H.
Högberg
,
J.
Emmerlich
,
P.
Eklund
,
O.
Wilhelmsson
,
J.-P.
Palmquist
,
U.
Jansson
, and
L.
Hultman
,
Proceedings of the 11th International Ceramics Congress
,
Acireale
,
Sicily, Italy
, 4–9 June
2006
, p.
2648
.
34.
R.
Mertens
,
Z.
Sun
,
D.
Music
, and
J. M.
Schneider
,
Adv. Eng. Mater.
6
,
903
(
2004
).
35.
J. M.
Schneider
,
R.
Mertens
, and
D.
Music
,
J. Appl. Phys.
99
,
013501
(
2006
).
36.
C.
Walter
,
C.
Martinez
,
T.
El-Raghy
, and
J. M.
Schneider
,
Steel Res. Int.
76
,
225
(
2005
).
37.
C.
Walter
,
D. P.
Sigumonrong
,
T.
El-Raghy
, and
J. M.
Schneider
,
Thin Solid Films
515
,
389
(
2006
).
38.
P.
Eklund
 et al,
J. Vac. Sci. Technol. B
23
,
2486
(
2005
).
39.
J.
Alami
,
P.
Eklund
,
J.
Emmerlich
,
O.
Wilhelmsson
,
U.
Jansson
,
H.
Högberg
,
L.
Hultman
, and
U.
Helmersson
,
Thin Solid Films
515
,
1731
(
2006
).
40.
Y.
Zhang
,
H. J.
Whitlow
,
T.
Winzell
,
I. F.
Bubb
,
T.
Sajavaara
,
J.
Jokinen
,
K.
Arstila
, and
J.
Keinonen
,
Nucl. Instrum. Methods Phys. Res. B
149
,
477
(
1999
).
41.
M. S.
Janson
,
CONTES Instruction Manual
(unpublished).
42.
J.
Frodelius
,
P.
Eklund
,
M.
Beckers
,
H.
Högberg
, and
L.
Hultman
(unpublished).
43.
L. R.
Shaginyan
,
M.
Misina
,
S.
Kadlec
,
L.
Jastrabik
,
A.
Mackova
, and
V.
Perina
,
J. Vac. Sci. Technol. A
19
,
2554
(
2001
).
44.
J. F.
Ziegler
and
J. P.
Biersack
, SRIM-2003 Software (www.srim. org).
45.
P.
Eklund
, Ph.D. Thesis,
Linköping University
,
2007
;
available online at Linköping University Electronic Press, www.ep.liu.se
46.
O.
Wilhelmsson
and
P.
Eklund
(unpublished).
47.
J. M.
Andersson
, Ph.D. Thesis,
Linköping University
,
2005
;
available online at Linköping University Electronic Press, www.ep.liu.se
48.
W. O.
Hofer
, in
Sputtering by Particle Bombardment
,
Topics in Applied Physics Vol. III
, edited by
R.
Behrisch
and
K.
Wittmaack
(
Springer
,
Berlin
,
1991
).
49.
V. S.
Chernysh
,
V. S.
Kulikauskas
,
A. S.
Patrakkeev
,
K. M.
Abdul-Cader
, and
V. I.
Shulga
,
Radiat. Eff. Defects Solids
159
,
149
(
2004
).
50.
V. S.
Chernysh
,
A. S.
Patrakeev
, and
V. I.
Shulga
,
Radiat. Eff. Defects Solids
161
,
701
(
2006
).
51.
Z. J.
Lin
,
M. J.
Zhuo
,
Y. C.
Zhou
,
M. S.
Li
, and
J. Y.
Wang
,
Scr. Mater.
55
,
445
(
2006
).
52.
P.
Eklund
,
H.
Högberg
, and
L.
Hultman
,
Phys. Status Solidi RRL
1
,
113
(
2007
).
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