The authors have investigated the morphological evolution of Al whiskers grown by high temperature glancing angle deposition (HT-GLAD). The critical temperature of formation of the Al whisker at a deposition angle of 85° is found to be between 180 and , and it is much lower than that reported for the Al whiskers grown on a hot tungsten wire by the conventional evaporation technique. The morphology of the whiskers grown at a substrate temperature of reveals that a significant amount of Al is supplied to the whiskers through their base by surface diffusion and that the diffusion length of adatoms on the side surface of the whiskers reaches approximately . It has also been confirmed that a significant number of Al atoms that have been incorporated into the whiskers move in such a manner that drastic changes can occur in the morphology of the whiskers. HT-GLAD is a potential process for providing nanosized metal whiskers.
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July 2007
Research Article|
July 03 2007
Morphological evolution of Al whiskers grown by high temperature glancing angle deposition
Motofumi Suzuki;
Motofumi Suzuki
a)
Department of Micro Engineering,
Kyoto University
, Kyoto 606-8501, Japan
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Koji Nagai;
Koji Nagai
Department of Micro Engineering,
Kyoto University
, Kyoto 606-8501, Japan
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Sadamu Kinoshita;
Sadamu Kinoshita
Department of Micro Engineering,
Kyoto University
, Kyoto 606-8501, Japan
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Kaoru Nakajima;
Kaoru Nakajima
Department of Micro Engineering,
Kyoto University
, Kyoto 606-8501, Japan
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Kenji Kimura;
Kenji Kimura
Department of Micro Engineering,
Kyoto University
, Kyoto 606-8501, Japan
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Tomoki Okano;
Tomoki Okano
KOBELCO Research Institute, Inc.
, 1-5-5 Takatsukadai, Nishi-ku, Kobe 651-2271, Japan
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Kaoru Sasakawa
Kaoru Sasakawa
KOBELCO Research Institute, Inc.
, 1-5-5 Takatsukadai, Nishi-ku, Kobe 651-2271, Japan
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a)
Electronic mail: m-snki@mbox.kudpc.kyoto-u.ac.jp
J. Vac. Sci. Technol. A 25, 1098–1102 (2007)
Article history
Received:
October 03 2006
Accepted:
April 16 2007
Citation
Motofumi Suzuki, Koji Nagai, Sadamu Kinoshita, Kaoru Nakajima, Kenji Kimura, Tomoki Okano, Kaoru Sasakawa; Morphological evolution of Al whiskers grown by high temperature glancing angle deposition. J. Vac. Sci. Technol. A 1 July 2007; 25 (4): 1098–1102. https://doi.org/10.1116/1.2739549
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