The authors have measured the lifetime of metastable state (3sP524) of F atoms by resonant laser-induced fluorescence method. For this experiment, a special 2.45GHz electron cyclotron resonance (ECR) plasma source, which is highly efficient in F radical generation and free from magnetic field leakage in front of the beam-emitting orifice, has been developed. Using the ECR plasma gun, the authors observed a precision fluorescence spectrum related to 3pD7204(F=4)3sP524(F=3) transition of F radicals, which made it possible to experimentally determine the longitudinal velocity distribution and the angular spread of the F radical beam. Based on these measured beam characteristics, the authors extracted a true decay curve of fluorescence intensity as a function of distance from the source and determined the lifetime of F metastable state (3sP524) as 7.3±0.5μs.

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