The authors have measured the lifetime of metastable state of F atoms by resonant laser-induced fluorescence method. For this experiment, a special electron cyclotron resonance (ECR) plasma source, which is highly efficient in F radical generation and free from magnetic field leakage in front of the beam-emitting orifice, has been developed. Using the ECR plasma gun, the authors observed a precision fluorescence spectrum related to transition of F radicals, which made it possible to experimentally determine the longitudinal velocity distribution and the angular spread of the F radical beam. Based on these measured beam characteristics, the authors extracted a true decay curve of fluorescence intensity as a function of distance from the source and determined the lifetime of F metastable state as .
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November 2006
Research Article|
October 12 2006
Lifetime measurement of metastable fluorine atoms using electron cyclotron resonance plasma source Available to Purchase
Masao Shimizu;
Masao Shimizu
Yasu Semiconductor Corporation
, 686-1 Ichimiyake, Yasu-cho, Yasu-gun, Shiga 520-2632, Japan
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Hiromasa Ohmi;
Hiromasa Ohmi
Department of Precision Science and Technology, Graduate School of Engineering,
Osaka University
, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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Hiroaki Kakiuchi;
Hiroaki Kakiuchi
Department of Precision Science and Technology, Graduate School of Engineering,
Osaka University
, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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Kiyoshi Yasutake
Kiyoshi Yasutake
a)
Department of Precision Science and Technology, Graduate School of Engineering,
Osaka University
, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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Masao Shimizu
Hiromasa Ohmi
Hiroaki Kakiuchi
Kiyoshi Yasutake
a)
Yasu Semiconductor Corporation
, 686-1 Ichimiyake, Yasu-cho, Yasu-gun, Shiga 520-2632, Japana)
Electronic mail: [email protected]
J. Vac. Sci. Technol. A 24, 2133–2138 (2006)
Article history
Received:
February 15 2006
Accepted:
September 01 2006
Citation
Masao Shimizu, Hiromasa Ohmi, Hiroaki Kakiuchi, Kiyoshi Yasutake; Lifetime measurement of metastable fluorine atoms using electron cyclotron resonance plasma source. J. Vac. Sci. Technol. A 1 November 2006; 24 (6): 2133–2138. https://doi.org/10.1116/1.2357959
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