In this work, parylene-C is exposed to the effluent from a microwave ammonia plasma with a goal of producing primary amine groups on the parylene-C. These amine groups are desired as sites for the attachment of various biomolecules that will influence the biocompatibility of the parylene-C. Ammonia plasma treatment is an effective approach for creating amine species on polymers. In this work, attenuated total reflectance infrared spectroscopy studies showed that no primary amine groups resulted from this treatment of parylene-C. Instead, reactive nitrogen-bearing radicals from the plasma appear to have been complexed by chlorine in the polymer. The formation of these complexes scavenged nitrogen-bearing radicals from the plasma and prevented the formation of nitrogenous species, such as the desired primary amines, on the parylene-C. These results are consistent with results of ammonia plasma treatment of other chlorinated polymers and suggest that alternative approaches are required to create nitrogen-bearing species on parylene-C.
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November 2005
Research Article|
October 24 2005
Ammonium chloride complex formation during downstream microwave ammonia plasma treatment of parylene-C Available to Purchase
K. G. Pruden;
K. G. Pruden
a)
Department of Chemical and Materials Engineering,
Arizona State University
, Tempe, Arizona 85287-6006
Search for other works by this author on:
S. P. Beaudoin
S. P. Beaudoin
b)
Department of Chemical and Materials Engineering,
Arizona State University
, Tempe, Arizona 85287-6006 and School of Chemical Engineering, Purdue University
, Forney Hall of Chemical Engineering, 480 Stadium Mall Drive, West Lafayette, Indiana 47907-2100
Search for other works by this author on:
K. G. Pruden
a)
Department of Chemical and Materials Engineering,
Arizona State University
, Tempe, Arizona 85287-6006
S. P. Beaudoin
b)
Department of Chemical and Materials Engineering,
Arizona State University
, Tempe, Arizona 85287-6006 and School of Chemical Engineering, Purdue University
, Forney Hall of Chemical Engineering, 480 Stadium Mall Drive, West Lafayette, Indiana 47907-2100a)
Present address: University of Chicago, Department of Chemistry, 5735 South Ellis Avenue, Chicago, IL 60637.
b)
Author to whom correspondence should be addressed; electronic mail: [email protected]
J. Vac. Sci. Technol. A 23, 1605–1609 (2005)
Article history
Received:
July 09 2004
Accepted:
August 01 2005
Citation
K. G. Pruden, S. P. Beaudoin; Ammonium chloride complex formation during downstream microwave ammonia plasma treatment of parylene-C. J. Vac. Sci. Technol. A 1 November 2005; 23 (6): 1605–1609. https://doi.org/10.1116/1.2049305
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