The sputtering yields of tungsten and tantalum due to low-energy xenon ion bombardment in a plasma environment are measured both using weight loss and spectroscopic techniques. The yields of both tungsten and tantalum are practically identical and show a reduction of 3 when compared to the molybdenum yield at and a reduction of a factor of 10 when compared to the molybdenum yield at .
REFERENCES
1.
2.
K.
Krieger
et al, J. Nucl. Mater.
337–339
, 10
(2005
).3.
H. P.
Summers
and M. G.
O’Mullane
, “The Atomic Data and Analysis Structure
,” in Nuclear Fusion Research, Understanding Plasma-Surface Interactions
, edited by R. E. H.
Clark
and D. H.
Reiter
(Springer
, Berlin, 2005
).4.
C.
Kittel
, Introduction to Solid State Physics
(Wiley
, New York, 1976
).5.
A.
Geier
et al, Rev. Sci. Instrum.
70
, 63
(1999
).6.
M. G.
O’Mullane
(private communication).© 2005 American Vacuum Society.
2005
American Vacuum Society
You do not currently have access to this content.