Turbomolecular pumps (TMPs) are widely used in the semiconductor and other thin film industries. Some semiconductor processes form corrosive gases such as HCl or HF as byproducts. The elements of a TMP are sometimes coated with ceramic film for the purpose of preventing corrosion of the TMP. The blades coated with have relatively rough surfaces. The effect of the surface roughness of the blades on the pumping performance has been studied experimentally and theoretically. Experimental results for TMPs with two rotor disks and one stator disk show that the TMP coated with film gives about 11% to 13% higher maximum-compression ratio than the noncoated TMP when the blade speed ratio is 0.47. The theory based on the conic peak/dimple-surface-roughness model that has been proposed by the authors explains the change in the compression ratio with the surface roughness shown in the experiment.
Effect of blade-surface-roughness on the pumping performance of a turbomolecular pump
T. Sawada, M. Yabuki, W. Sugiyama, M. Watanabe; Effect of blade-surface-roughness on the pumping performance of a turbomolecular pump. J. Vac. Sci. Technol. A 1 November 2005; 23 (6): 1538–1544. https://doi.org/10.1116/1.2101794
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