The goal of a single (dry) pump capable of reaching high vacuum and itself exhausting to atmospheric pressure has long existed in the vacuum field. The development of a single-shaft, high-speed pump EPX (second generation) mechanism has gone some considerable way to achieving this goal. The pump exploits molecular drag and a fluid dynamic mechanism and is discussed in terms of the theory of operation, internal flow mechanisms and the technology innovations enabling the mechanism to be produced in large volume quantities. Further development and application examples will be discussed to illustrate the system-simplification that the pump can provide.

1.
P. R.
Davis
,
R. A.
Abreu
, and
A. D.
Chew
,
J. Vac. Sci. Technol. A
18
(
2000
).
2.
M.
Holweck
,
C. R. Hebd. Seances Acad. Sci.
177
,
43
(
1923
).
3.
J. C.
Helmer
,
J. Vac. Sci. Technol. A
13
,
2592
(
1995
).
4.
H. W.
Iverson
,
Trans. ASME
(
1995
).
5.
W. A.
Wilson
,
M. A.
Santalo
, and
J. A.
Oelrich
,
Trans. ASME
(
1955
).
6.
H.
Sixsmith
, presented to the
Institute of Refrigeration
, May
1981
.
You do not currently have access to this content.