Polarization dependent near and extended x-ray absorption fine-structure (XANES and EXAFS), in combination with x-ray diffraction, has been used to study the structure of (STO) ultra thin films grown on Si(001). For the in-plane direction (200), the x-ray diffraction data indicate that all films (from 40 to 200 Å) are equally expanded. This is in contradiction to previous reports claiming that the growth is pseudomorphic and epitaxial (coherent), which would predict an inplane contraction. Even the thinnest films (40 Å) grow in a relaxed mode (not coherent) at the deposition temperature (700 °C). As the system is brought to room temperature, the films (now anchored to the substrate) are not allowed to compress as much as bulk STO. The residual film expansion is quantitatively explained by the differential thermal expansion of Si and STO. For the out-of-plane direction (002), the x-ray diffraction data indicate that STO films are expanded for the thinnest films, and relaxed for a thickness of 200 Å. The in-plane and out-of-plane EXAFS and XANES data show that the perpendicular expansion of the thinner films is accompanied by a displacive phase transition of where the Ti atom moves toward the (002) direction. This ferroelectric-type behavior of the thinner films implies important potential applications in electronics.
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July 2004
Papers from the 50th International AVS Symposium and Exhibition
2-7 November 2003
Baltimore, Maryland (USA)
Research Article|
July 20 2004
Displacive phase transition in thin films grown on Si(001)
F. S. Aguirre-Tostado;
F. S. Aguirre-Tostado
CINVESTAV-Querétaro, Apartado Postal 1-798, Querétaro 76001, México
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A. Herrera-Gómez;
A. Herrera-Gómez
CINVESTAV-Querétaro, Apartado Postal 1-798, Querétaro 76001, México
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J. C. Woicik;
J. C. Woicik
National Institute of Standards and Technology, Gaithersburg, Maryland 20899
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R. Droopad;
R. Droopad
Physical Sciences Research Labs, Motorola, 2100 East Elliot Road, Tempe, Arizona 85284
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Z. Yu;
Z. Yu
Physical Sciences Research Labs, Motorola, 2100 East Elliot Road, Tempe, Arizona 85284
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D. G. Schlom;
D. G. Schlom
Materials Science and Engineering, Pennsylvania State University, University Park, Pennsylvania 16802
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J. Karapetrova;
J. Karapetrova
University of Illinois, APS-UNICAT, Argonne National Lab, Argonne, Illinois 60439
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P. Zschack;
P. Zschack
University of Illinois, APS-UNICAT, Argonne National Lab, Argonne, Illinois 60439
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P. Pianetta
P. Pianetta
Stanford Synchrotron Radiation Laboratory, Stanford, California 94309
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J. Vac. Sci. Technol. A 22, 1356–1360 (2004)
Article history
Received:
December 03 2003
Accepted:
May 05 2004
Citation
F. S. Aguirre-Tostado, A. Herrera-Gómez, J. C. Woicik, R. Droopad, Z. Yu, D. G. Schlom, J. Karapetrova, P. Zschack, P. Pianetta; Displacive phase transition in thin films grown on Si(001). J. Vac. Sci. Technol. A 1 July 2004; 22 (4): 1356–1360. https://doi.org/10.1116/1.1765657
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