Polarized far infrared reflectance was measured at oblique incidence for InGaAs/InP superlattices grown lattice matched on InP(100) wafers by chemical beam epitaxy. The contributions to the reflectance spectrum of the phonon modes of the individual layers were resolved with a generalized analysis procedure. For very thin (0.25 nm thick) alloy layers we observed InAs-like, GaAs-like, InP-like, and GaP-like modes consistent with alternating interface layers composed of InAsP and InGaAsP and having a total thickness per period of 1.2 nm. Surprisingly, the InP spacer layers were found to be compressively strained, with the strain increasing with the layer distance from the substrate. This effect is a consequence of the uncompensated strain in the asymmetric structure of the interface layers.
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May 2004
11th Canadian Semiconductor Technology Conference
18-22 August 2003
Ottawa, Canada
Research Article|
May 18 2004
Interface layers in superlattices
N. L. Rowell;
N. L. Rowell
National Research Council, Ottawa, Canada K1A 0R6
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G. Yu;
G. Yu
National Research Council, Ottawa, Canada K1A 0R6
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D. J. Lockwood;
D. J. Lockwood
National Research Council, Ottawa, Canada K1A 0R6
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P. J. Poole
P. J. Poole
National Research Council, Ottawa, Canada K1A 0R6
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J. Vac. Sci. Technol. A 22, 897–901 (2004)
Article history
Received:
September 12 2003
Accepted:
November 17 2003
Citation
N. L. Rowell, G. Yu, D. J. Lockwood, P. J. Poole; Interface layers in superlattices. J. Vac. Sci. Technol. A 1 May 2004; 22 (3): 897–901. https://doi.org/10.1116/1.1640393
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