On-chip integration of optical switches and planar light circuits (PLCs) can greatly reduce the size, manufacturing cost, and operating cost of multicomponent optical systems. A silicon-on-insulator platform for integrating microelectromechanical system (MEMS) latching optical waveguide switches with PLCs is presented including a working example of chip scale integration of reconfigurable-optical add/drop multiplexer and λ-Routers, along with details of the integrated latching MEMS optical switches.
REFERENCES
1.
2.
3.
R. A.
Soref
, J.
Schmidtchen
, and K.
Petermann
, IEEE J. Quantum Electron.
27
, 1971
(1991
).4.
K. K.
Lee
, D. R.
Lim
, H.
Luan
, A.
Agarwal
, J.
Foresi
, and L.
Kimerling
, Appl. Phys. Lett.
77
, 1617
(2000
).5.
B.
Jalali
, S.
Yegnanarayanan
, T.
Yoon
, T.
Yoshimoto
, I.
Rendina
, and F.
Coppinger
, IEEE J. Sel. Top. Quantum Electron.
4
, 938
(1998
).6.
T.
Bake
, C. P.
Tigges
, J. J.
Lean
, C. T.
Sullivan
, and O. B.
Spahn
, IEEE J. Sel. Top. Quantum Electron.
8
, 64
(2002
).7.
J. J.
Fijol
, E. E.
Fike
, P. B.
Keating
, D.
Gilbody
, J.
LeBlanc
, S. A.
Jacobson
, W. J.
Kessler
, and M. B.
Frish
, Proc. SPIE
4997
, 157
(2003
).
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2004
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