This article estimates the pumping performance of a turbobooster vacuum pump (TBP), with spiral-grooved rotor and inner housing, by the computational fluid dynamics method. The computational domain comprises the flow channels in the rotor and inner housing. Thus, the simulated gas can flow continuously from the inlet of the rotor through the outlet, into the inner housing, and then out the exit port of the pump. The calculations show that the pumping performance of the TBP can be enhanced when the spiral-grooved inner housing is integrated. The spiral angle of the rotor, the groove number, and the spiral angle of the inner housing have to be designed carefully to increase the effective pumping length of the flow channel of the TBP to gain further energy from the rotational energy, overcome the subsequent increased friction force, and increase the pumping performance. The calculations also show that the compression ratio and the pumping speed in this case, which comprises the rotor with five grooves and 15° spiral angle and the inner housing with five grooves and 27° spiral angle, are the largest among all cases studied in this article.
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July 2003
Papers from the 49th International Symposium of the American Vacuum Society
3-8 November 2002
Denver, Colorado (USA)
Research Article|
July 02 2003
Pumping performance investigation of a turbobooster vacuum pump equipped with spiral-grooved rotor and inner housing by the computational fluids dynamics method
H.-P. Cheng;
H.-P. Cheng
Department of Air-Conditioning and Refrigeration Engineering, National Taipei University of Technology, 1, Sec. 3, Chung-Hsiao E. Road, Taipei 106, Taiwan, Republic of China
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M.-T. Chiang
M.-T. Chiang
Department of Air-Conditioning and Refrigeration Engineering, National Taipei University of Technology, 1, Sec. 3, Chung-Hsiao E. Road, Taipei 106, Taiwan, Republic of China
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J. Vac. Sci. Technol. A 21, 1458–1463 (2003)
Article history
Received:
October 02 2002
Accepted:
May 05 2003
Citation
H.-P. Cheng, M.-T. Chiang; Pumping performance investigation of a turbobooster vacuum pump equipped with spiral-grooved rotor and inner housing by the computational fluids dynamics method. J. Vac. Sci. Technol. A 1 July 2003; 21 (4): 1458–1463. https://doi.org/10.1116/1.1586279
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