Simulation results and experimental measurements in an oxygen ICP are used to examine transport and reaction in oxygen inductively coupled plasmas. The trends of plasma characteristics with pressure and rf power are considered. We show that the balance between gas phase dissociation and surface O recombination controls the plasma characteristics under the investigated conditions. Neutral density profiles are primarily the result of diffusive transport in balance with fast surface reactions. According to the model, the and metastable states play an important role in dissociation, ionization, and attachment kinetics. The metastable is not kinetically important.
Skip Nav Destination
Research Article| April 10 2003
Inductively coupled plasmas in oxygen: Modeling and experiment
Mark W. Kiehlbauch;
Mark W. Kiehlbauch, David B. Graves; Inductively coupled plasmas in oxygen: Modeling and experiment. J. Vac. Sci. Technol. A 1 May 2003; 21 (3): 660–670. https://doi.org/10.1116/1.1564024
Download citation file: