Multiple phase structures of crystalline hafnium silicide precipitated from the silicate have been found as a function of temperature (900–1000 °C) by using scanning tunneling microscopy and x-ray photoelectron spectroscopy. At 900 °C, a crystalline silicate structure transforms into a bulklike (1×1) “facetbar” of HfSi2 near the topmost surface, but into a “platelet” around the interface with Si. A Si-depletion zone is found to only form near platelets, not facetbars. Upon further annealing to 1000 °C, facetbars likely transform into platelets, and the atomic structure of a platelet also transforms to a patchlike feature having two equivalent antiphase sites, which are shifted by a half (∼2.3 Å) of the (1×1) unit length along the 〈110〉 directions.

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