Semiempirical theory for secondary electron emission is extended to cover the layered structure. Secondary electron emission for the two-layered structure, i.e., a thin film on a substrate, is calculated and compared with the experiment. Good agreement between the two indicates the usefulness of this theory for the layered structure.
Secondary electron emission for layered structures
SeGi Yu, Whikun Yi, Taewon Jeong, Jeonghee Lee, Jungna Heo, Chang Soo Lee, D. Jeon, J. M. Kim; Secondary electron emission for layered structures. J. Vac. Sci. Technol. A 1 May 2002; 20 (3): 950–952. https://doi.org/10.1116/1.1472415
Download citation file: