Semiempirical theory for secondary electron emission is extended to cover the layered structure. Secondary electron emission for the two-layered structure, i.e., a thin film on a substrate, is calculated and compared with the experiment. Good agreement between the two indicates the usefulness of this theory for the layered structure.

Topics
Surface collisions, Thin films, Approximation methods
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© 2002 American Vacuum Society.
2002
American Vacuum Society
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