structures are prepared and characterized by electrical measurements. The GaAs (100) surfaces are cleaned and passivated by chemical solutions. A passivation treatment based on ammonium polysulfide is applied, then an insulating layer is deposited by electron-beam evaporation of an amorphous By adjusting the passivation and the insulator deposition parameters, the accumulation and inversion conditions are observed by a capacitance–voltage technique, showing that the Fermi level is unpinned. The interface-states density as calculated using the method of Terman applied to high-frequency characteristics presents a minimum of
© 2002 American Vacuum Society.
2002
American Vacuum Society
You do not currently have access to this content.