We first discuss the limitations of Raman scattering as applied to Ge/Si nanostructures. We further summarize our recent efforts to investigate the local structure of various Ge nanostructures, namely, Ge quantum dots grown by molecular beam epitaxy (MBE) on bare Si(100), on Si(111) with a 0.3 nm coverage, and nanocrystals embedded in by x-ray absorption fine structure spectroscopy. In particular, the MBE growth of Ge dots on bare Si(100) has been studied as a function of the growth conditions: in most cases strong alloying with Si takes place. Ge nanoislands on Si(111) with coverage, on the other hand, may retain the local structure of bulk Ge and be very stable against oxidation. The Ge nanocrystals embedded in possess the structure of relaxed bulk Ge without any Ge–Si bonding. The latter two kinds of Ge nanostructures possess visible photoluminescence.
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May 2002
Papers from the 10th Canadian Semiconductor Technology Conference
13-17 August 2001
Chateau Laurier Hotel, Ottawa (Canada)
Research Article|
May 07 2002
Effect of the interface on the local structure of Ge–Si nanostructures
A. V. Kolobov;
A. V. Kolobov
National Institute of Advanced Industrial Science and Technology, Joint Research Center for Atom Technology, Tsukuba Central 4, 1-1-1 Higashi, Ibaraki 305-8562, Japan
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H. Oyanagi;
H. Oyanagi
National Institute of Advanced Industrial Science and Technology, Tsukuba Central 2, 1-1-1 Higashi, Umezono 305-8568, Japan
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K. Brunner;
K. Brunner
Walter Schottkey Institute, Technical University Munich, Am Coulombwall, 85748 Garshing, Germany
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G. Abstreiter;
G. Abstreiter
Walter Schottkey Institute, Technical University Munich, Am Coulombwall, 85748 Garshing, Germany
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Y. Maeda;
Y. Maeda
Osaka Prefecture University, 1-1 Gakuencho, Sakai, Osaka 599-8531, Japan
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A. A. Shklyaev;
A. A. Shklyaev
Joint Research Center for Atom Technology – Angstrom Technology Partnership, Tsukuba, Ibaraki 305-0046, Japan
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S. Yamasaki;
S. Yamasaki
National Institute of Advanced Industrial Science and Technology, Joint Research Center for Atom Technology, Tsukuba Central 4, 1-1-1 Higashi, Ibaraki 305-8562, Japan
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M. Ichikawa;
M. Ichikawa
Joint Research Center for Atom Technology – Angstrom Technology Partnership, Tsukuba, Ibaraki 305-0046, Japan
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K. Tanaka
K. Tanaka
Joint Research Center for Atom Technology – Angstrom Technology Partnership, Tsukuba, Ibaraki 305-0046, Japan
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J. Vac. Sci. Technol. A 20, 1116–1119 (2002)
Article history
Received:
August 14 2001
Accepted:
January 21 2002
Citation
A. V. Kolobov, H. Oyanagi, K. Brunner, G. Abstreiter, Y. Maeda, A. A. Shklyaev, S. Yamasaki, M. Ichikawa, K. Tanaka; Effect of the interface on the local structure of Ge–Si nanostructures. J. Vac. Sci. Technol. A 1 May 2002; 20 (3): 1116–1119. https://doi.org/10.1116/1.1460894
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