Cathode cooling apparatus for a planar magnetron sputtering system

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Brief Report| July 01 1984

M. R. Lake;

M. R. Lake

School of Physics, University of Sydney, N.S.W. 2006, Australia

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G. L. Harding

School of Physics, University of Sydney, N.S.W. 2006, Australia

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J. Vac. Sci. Technol. A 2, 1391–1393 (1984)

https://doi.org/10.1116/1.572372

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