This content is only available via PDF.
© 1984 American Vacuum Society.
1984
American Vacuum Society
You do not currently have access to this content.
J. de Rijke; Summary Abstract: New vacuum process demand trends in semiconductor sputter‐coating applications. J. Vac. Sci. Technol. A 1 April 1984; 2 (2): 1207–1208. https://doi.org/10.1116/1.572703
Download citation file: