Summary Abstract: New vacuum process demand trends in semiconductor sputter‐coating applications

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Dissertation| April 01 1984

J. de Rijke

Varian, Industrial Components Division, Santa Clara, California 94054

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PubMed

J. Vac. Sci. Technol. A 2, 1207–1208 (1984)

https://doi.org/10.1116/1.572703

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