We grew vertically aligned carbon nanotubes (CNTs) using microwave plasma-enhanced (MPE) and thermal chemical-vapor deposition (CVD) and characterized their field emission properties. We observe that the flickering and instability in the field emission are due to the metal particles present on the field-emission array (FEA) surface, particularly from the MPECVD-grown samples. The existence of metal particles is an obstacle to obtaining reliable emission properties. The emission properties of the CNT–FEA are studied as a function of gas-exposure time with hydrogen, nitrogen, and oxygen gases. Gas exposures affected turn-on voltage, hysteresis, and the slope of Fowler–Nordheim plots. We observe that the saturation of emission currents is attributed to gas adsorbates present on the surface of the FEA. Oxygen exposures induce more severe degradation on the field-emission properties than nitrogen, whereas emission properties are improved by hydrogen gas exposures that clean the surface of emitters. In addition, hydrogenation of carbon nanotubes has technical importance for activation of the CNT–FEA.
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July 2001
The 47th international symposium: Vacuum, thin films, surfaces/interfaces, and processing NAN06
2-6 Oct 2000
Boston, Massachusetts (USA)
Research Article|
July 01 2001
Field-emission properties of vertically aligned carbon-nanotube array dependent on gas exposures and growth conditions
S. C. Lim;
S. C. Lim
Semiconductor Physics Research Center, Jeonbuk National University, Jeonju 561-756, Republic of Korea
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H. J. Jeong;
H. J. Jeong
Semiconductor Physics Research Center, Jeonbuk National University, Jeonju 561-756, Republic of Korea
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Y. S. Park;
Y. S. Park
Semiconductor Physics Research Center, Jeonbuk National University, Jeonju 561-756, Republic of Korea
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D. S. Bae;
D. S. Bae
Semiconductor Physics Research Center, Jeonbuk National University, Jeonju 561-756, Republic of Korea
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Y. C. Choi;
Y. C. Choi
Material Research Lab., CRD Center, Samsung SDI, Suwon 442-391, Republic of Korea
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Y. M. Shin;
Y. M. Shin
Department of Physics, Institute of Basic Science, Sungkyunkwan University, Suwon 440-746, Republic of Korea
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W. S. Kim;
W. S. Kim
Department of Physics, Institute of Basic Science, Sungkyunkwan University, Suwon 440-746, Republic of Korea
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K. H. An;
K. H. An
Department of Physics, Institute of Basic Science, Sungkyunkwan University, Suwon 440-746, Republic of Korea
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Y. H. Lee
Y. H. Lee
Department of Physics, Institute of Basic Science, Sungkyunkwan University, Suwon 440-746, Republic of Korea
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J. Vac. Sci. Technol. A 19, 1786–1789 (2001)
Article history
Received:
September 13 2000
Accepted:
March 26 2001
Citation
S. C. Lim, H. J. Jeong, Y. S. Park, D. S. Bae, Y. C. Choi, Y. M. Shin, W. S. Kim, K. H. An, Y. H. Lee; Field-emission properties of vertically aligned carbon-nanotube array dependent on gas exposures and growth conditions. J. Vac. Sci. Technol. A 1 July 2001; 19 (4): 1786–1789. https://doi.org/10.1116/1.1372915
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