Photon-stimulated desorption (PSD) was studied by using synchrotron light at a critical energy of 2.14 keV from the 1.5 GeV Taiwan Light Source. Samples of aluminum alloy (Al) and oxygen-free-high-conductivity copper (Cu) was studied at the 19B(PSD) beam line of the Synchrotron Radiation Research Center for exposure measurement. The yields of photoemission and the PSD are measured at different exposure beam doses. The result shows a decrease of the PSD yield for each gas and a decreased yield of photoemission at higher beam doses on the samples. The transient curves of pressure rise for each PSD molecule illustrate a longer delay time τ of the peak after exposing the surface with higher beam dose D. The delay time of and are longer than that of CO, etc., in the case of both Al and Cu samples. In this work, it is found that with in cases where The discrepancy between the Al and Cu samples is not much different at higher beam doses. The processes of the chemical reactions by the photoelectrons and diffusion in the surface oxide layer are suspected to conduct the dose-dependent PSD phenomena.
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July 2001
The 47th international symposium: Vacuum, thin films, surfaces/interfaces, and processing NAN06
2-6 Oct 2000
Boston, Massachusetts (USA)
Research Article|
July 01 2001
Study of the exposure-dose-dependent photon-stimulated-desorption phenomena
G. Y. Hsiung;
G. Y. Hsiung
Synchrotron Radiation Research Center, No. 1 R&D Road VI, Hsinchu 300, Taiwan
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K. Y. Young;
K. Y. Young
Department of Nuclear Science, National Tsing-Hua University, Hsinchu 300, Taiwan
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Y. J. Hsu;
Y. J. Hsu
Synchrotron Radiation Research Center, No. 1 R&D Road VI, Hsinchu 300, Taiwan
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J. R. Chen
J. R. Chen
Synchrotron Radiation Research Center, No. 1 R&D Road VI, Hsinchu 300, Taiwan
Department of Nuclear Science, National Tsing-Hua University, Hsinchu 300, Taiwan
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J. Vac. Sci. Technol. A 19, 1657–1661 (2001)
Article history
Received:
October 09 2000
Accepted:
April 09 2001
Citation
G. Y. Hsiung, K. Y. Young, Y. J. Hsu, J. R. Chen; Study of the exposure-dose-dependent photon-stimulated-desorption phenomena. J. Vac. Sci. Technol. A 1 July 2001; 19 (4): 1657–1661. https://doi.org/10.1116/1.1376705
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