Atomistic simulations are used to study thin-film growth through the deposition of beams of adamantane molecules on hydrogen-terminated diamond (111) surfaces. A range of incident velocities from 13 to 17 km/s (corresponding to kinetic energies of 119–204 eV/molecule) are considered that fall in the hyperthermal energy region for particle deposition on surfaces. The forces on the atoms in the simulations are calculated using a many-body reactive empirical potential for hydrocarbons. During the deposition process the adamantane molecules react with one another and the surface to form hydrocarbon thin films that are primarily polymeric with the amount of adhesion depending strongly on incident energy. Despite the fact that the carbon atoms in the adamantane molecules are fully hybridized, the films contain primarily hybridized carbon with the percentage of hybridization increasing as the incident velocity goes up. These results are compared with the predictions of simulations that examine the deposition of ethylene molecular and cluster beams.
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January 2001
Research Article|
January 01 2001
Hydrocarbon thin films produced from adamantane–diamond surface deposition: Molecular dynamics simulations Available to Purchase
Thomas A. Plaisted;
Thomas A. Plaisted
Department of Chemical and Materials Engineering, The University of Kentucky, Lexington, Kentucky 40506-0046
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Susan B. Sinnott
Susan B. Sinnott
Department of Chemical and Materials Engineering, The University of Kentucky, Lexington, Kentucky 40506-0046
Search for other works by this author on:
Thomas A. Plaisted
Department of Chemical and Materials Engineering, The University of Kentucky, Lexington, Kentucky 40506-0046
Susan B. Sinnott
Department of Chemical and Materials Engineering, The University of Kentucky, Lexington, Kentucky 40506-0046
J. Vac. Sci. Technol. A 19, 262–266 (2001)
Article history
Received:
August 25 2000
Accepted:
October 30 2000
Citation
Thomas A. Plaisted, Susan B. Sinnott; Hydrocarbon thin films produced from adamantane–diamond surface deposition: Molecular dynamics simulations. J. Vac. Sci. Technol. A 1 January 2001; 19 (1): 262–266. https://doi.org/10.1116/1.1335683
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