The near-surface atomic composition and the character of chemical bond in two nonevaporable gettering alloys have been investigated via core level (Zr Fe V O C photoemission. The samples have been measured in UHV after in-air fracturing and various annealing steps (up to 850 °C). For a progressive and sizeable decrease of the near surface C content along with an increase in the Zr concentration is observed in both alloys. An annealing induced Zr enrichment at the surface is found, the metallic atomic concentrations being significantly far from the nominal bulk stoichiometry. The annealing induces a strong evolution in the chemical bonds, the metallic species being completely oxidized in in-air fractured samples while a metallic character progressively emerges at increasing temperatures. Surface metallization proceeds faster in than in the V-containing getter.
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November 2000
Research Article|
November 01 2000
Near-surface chemistry in and ZrVFe studied by means of x-ray photoemission spectroscopy: A temperature-dependent study
Janez Kovac;
Janez Kovac
Laboratorio Nazionale TASC-INFM, Strada Statale 14, km 163.5 Basovizza, I-34012 Trieste, Italy
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Oumar Sakho;
Oumar Sakho
Laboratorio Nazionale TASC-INFM, Strada Statale 14, km 163.5 Basovizza, I-34012 Trieste, Italy
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Paolo Manini;
Paolo Manini
SAES Getters S.p.A., Viale Italia 77, I-20020 Lainate, Milano, Italy
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M. Sancrotti
M. Sancrotti
Laboratorio Nazionale TASC-INFM, Strada Statale 14, km 163.5 Basovizza, I-34012 Trieste, Italy
Dipartimento di Matematica e Fisica, Universitá Cattolica del Sacro Cuore, Campus of Brescia, Via dei Musei 41, I-25121 Brescia, Italy
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J. Vac. Sci. Technol. A 18, 2950–2956 (2000)
Article history
Received:
February 12 1999
Accepted:
July 17 2000
Citation
Janez Kovac, Oumar Sakho, Paolo Manini, M. Sancrotti; Near-surface chemistry in and ZrVFe studied by means of x-ray photoemission spectroscopy: A temperature-dependent study. J. Vac. Sci. Technol. A 1 November 2000; 18 (6): 2950–2956. https://doi.org/10.1116/1.1308591
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