Sequential turret source-masking system for fabrication of multilayer structures

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Letter| September 01 2000

T. Anthopoulos;

T. Anthopoulos

School of Engineering and Advanced Technology, Staffordshire University Beaconside, Stafford ST18 OAD, Staffordshire, United Kingdom

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T. S. Shafai

School of Engineering and Advanced Technology, Staffordshire University Beaconside, Stafford ST18 OAD, Staffordshire, United Kingdom

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J. Vac. Sci. Technol. A 18, 2595–2596 (2000)

https://doi.org/10.1116/1.1285989

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