Hot-carrier damage is a major issue in the long-term reliability of metal–oxide–semiconductor field effect transistors (MOSFETs). Hot-carrier induced damages have been shown to degrade various MOSFET characteristics—threshold voltage, channel charge mobility, parasitic drain and source resistances, and parasitic drain capacitance. The degradation induces changes in the small-signal s parameters of MOSFETs. Further experimental results indicate that such damages also degrade the radio frequency (rf) noise characteristics of a LLD n-type MOSFET (NMOSFET). The minimum noise figure and the normalized noise resistance –two key noise parameters—increase due to hot-carrier stress. The optimal reflection coefficient versus frequency curve also changes with increase stressing. The degradation in the rf noise characteristics of the LDD NMOSFET implies a serious issue in designing reliable, low-noise rf circuits with MOSFETs.
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March 2000
Papers from the ninth canadian semiconductor technology conference
10-13 Aug 1999
Ottawa, Canada
Research Article|
March 01 2000
Hot-carrier effects on radio frequency noise characteristics of LDD n-type metal–oxide–semiconductor field effect transistors
W. S. Kwan;
W. S. Kwan
School of Engineering Science, Simon Fraser University, Vancouver, British Columbia V5A 1S6, Canada
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C. H. Chen;
C. H. Chen
School of Engineering Science, Simon Fraser University, Vancouver, British Columbia V5A 1S6, Canada
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M. J. Deen
M. J. Deen
School of Engineering Science, Simon Fraser University, Vancouver, British Columbia V5A 1S6, Canada
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J. Vac. Sci. Technol. A 18, 765–769 (2000)
Article history
Received:
August 13 1999
Accepted:
November 17 1999
Citation
W. S. Kwan, C. H. Chen, M. J. Deen; Hot-carrier effects on radio frequency noise characteristics of LDD n-type metal–oxide–semiconductor field effect transistors. J. Vac. Sci. Technol. A 1 March 2000; 18 (2): 765–769. https://doi.org/10.1116/1.582176
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