The graphite macroparticle filtering efficiency of three different magnetic filter designs (straight duct, toroidal duct, and free-standing solenoid) used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon (ta-C) films was investigated. The particle contents in the coatings were measured using scanning electron microscopy (SEM) technique. In addition, during the ta-C deposition, long time exposure photographs were taken to see the graphite macroparticle trajectories and thus to qualitatively evaluate the filtering performance of different magnetic filters. The particle density measurements from the SEM images show that the filtering efficiency of the free-standing solenoid design is 13 times better than the filtering efficiency of the straight duct design. However, the toroidal duct design had only 3 times higher filtering efficiency compared to the straight duct design.
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September 1999
Research Article|
September 01 1999
Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films
M. Hakovirta;
M. Hakovirta
Los Alamos National Laboratory, Los Alamos, New Mexico 87545
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K. C. Walter;
K. C. Walter
Los Alamos National Laboratory, Los Alamos, New Mexico 87545
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B. P. Wood;
B. P. Wood
Los Alamos National Laboratory, Los Alamos, New Mexico 87545
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M. Nastasi
M. Nastasi
Los Alamos National Laboratory, Los Alamos, New Mexico 87545
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J. Vac. Sci. Technol. A 17, 3077–3080 (1999)
Article history
Received:
February 25 1999
Accepted:
May 21 1999
Citation
M. Hakovirta, K. C. Walter, B. P. Wood, M. Nastasi; Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films. J. Vac. Sci. Technol. A 1 September 1999; 17 (5): 3077–3080. https://doi.org/10.1116/1.582009
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