The recent development in the field of superhard materials with Vickers hardness of ⩾40 GPa is reviewed. Two basic approaches are outlined including the intrinsic superhard materials, such as diamond, cubic boron nitride, carbonitrides, etc. and extrinsic, nanostructured materials for which superhardness is achieved by an appropriate design of their microstructure. The theoretically predicted high hardness of has not been experimentally documented so far. Ceramics made of cubic boron nitride prepared at high pressure and temperature find many applications whereas thin films prepared by activated deposition from the gas phase are still in the stage of fundamental development. The greatest progress has been achieved in the field of nanostructured materials including superlattices and nanocomposites where superhardness of ⩾50 GPa was reported for several systems. More recently, nanocomposites with hardness of 105 GPa were prepared, reaching the hardness of diamond. The principles of design for these materials are summarized and some unresolved questions outlined.
REFERENCES
1.
W. Schedler, Hartmetall für den Praktiker (VDI, Düsseldorf, 1988).
2.
Metals Handbook, 10th ed., edited by J. R. Davis, P. Allen, S. R. Lampman et al., (ASM International, Metals Park, OH, 1990), Vol. 2, pp. 950 ff.
3.
T.
Cselle
and A.
Barimani
, Surf. Coat. Technol.
76–77
, 712
(1995
).4.
Phase Diagrams of Ternary Boron Nitride and Silicon Nitride Systems, edited by P. Rogl and J. C. Schuster (ASM International, Metals Park, OH, 1992).
5.
6.
S.
Vepřek
, M.
Haussmann
, S.
Reiprich
, L.
Shizhi
, and J.
Dian
, Surf. Coat. Technol.
86–87
, 394
(1996
).7.
D. Tabor, The Hardness of Metals (Clarendon, Oxford, 1951).
8.
9.
R. W. Hertzberg, Deformation and Fracture Mechanics of Engineering Materials, 3rd ed. (Wiley, New York, 1989).
10.
11.
12.
13.
14.
15.
16.
Y. Zhang (private communication, 1997).
17.
18.
Y.
Chen
, L.
Guo
, and E. G.
Wang
, J. Phys.: Condens. Mater.
8
, 685
(1996
).19.
20.
D. J.
Johnson
, Y.
Chen
, Y.
He
, and R. H.
Prince
, Diamond Relat. Mater.
6
, 1799
(1997
).21.
E. C.
Cutiongco
, D.
Li
, Y.-W.
Chung
, and C. S.
Bhatia
, J. Tribol.
118
, 543
(1996
).22.
23.
X.
Yun
, R. C.
Hsiao
, and D. B.
Bogy
, IEEE Trans. Magn.
33
, 938
(1997
).24.
25.
R. D.
Ott
, T. W.
Scharf
, D.
Yang
, and J. A.
Barnard
, IEEE Trans. Magn.
34
, 1735
(1998
).26.
Y. K.
Yap
, S.
Kida
, T.
Aoyama
, Y.
Mori
, and T.
Sasaki
, Appl. Phys. Lett.
73
, 915
(1998
).27.
28.
Y. F.
Lu
, Z. M.
Ren
, W. D.
Song
, and D. S. H.
Chan
, J. Appl. Phys.
84
, 2133
(1998
).29.
R.
Soto
, P.
Gonzáles
, X.
Redondas
, E. G.
Parada
, J.
Pou
, B.
León
, M.
Pérez-Amor
, M. F.
da Silvia
, and J. C.
Soares
, Nucl. Instrum. Methods Phys. Res. B
136–138
, 236
(1998
).30.
I. N.
Mihailescu
, E.
Gyorgy
, R.
Alexandrescu
, A.
Luches
, A.
Perrone
, C.
Ghica
, J.
Werckmann
, I.
Cojocaru
, and V.
Chumash
, Thin Solid Films
323
, 72
(1998
).31.
X. Q.
Meng
, Z. H.
Zhang
, H. X.
Guo
, A. G.
Li
, and X. J.
Fan
, Solid State Commun.
107
, 75
(1998
).32.
33.
E. Q.
Xie
, Y. F.
Jin
, Z. G.
Wang
, and D. Y.
He
, Nucl. Instrum. Methods Phys. Res. B
135
, 224
(1998
).34.
J.
Hartmann
, M.
Schreck
, T.
Baur
, H.
Huber
, W.
Assmann
, H.
Schuler
, B.
Strizker
, and B.
Rauschenbach
, Diamond Relat. Mater.
7
, 899
(1998
).35.
G.
Dinescu
, E.
Aldea
, G.
Musa
, M. C. M.
van de Sanden
, A.
de Graaf
, C.
Ghica
, M.
Gartner
, and A.
Andrei
, Thin Solid Films
325
, 123
(1998
).36.
37.
Y. K.
Yap
, S.
Kida
, T.
Aoyama
, Y.
Mori
, and T.
Sasaki
, Jpn. J. Appl. Phys., Part 2
37
, L746
(1998
).38.
L. C.
Chen
, T. R.
Lu
, C. T.
Kuo
, D. M.
Bushari
, J. J.
Wu
, K. H.
Chen
, and T. M.
Chen
, Appl. Phys. Lett.
72
, 3449
(1998
).39.
40.
A.
Czyzniewski
, W.
Precht
, M.
Pancielejko
, P.
Myslinski
, and W.
Walkowiak
, Thin Solid Films
317
, 384
(1998
).41.
L.
Nobili
, P. L.
Cavallotti
, G.
Coccia Lecis
, G.
De Ponti
, and C.
Lenardi
, Thin Solid Films
317
, 359
(1998
).42.
S.
Yoshida
, T.
Itoh
, N.
Takada
, S.
Nitta
, and S.
Nonomura
, J. Non-Cryst. Solids
227–230
, 650
(1998
).43.
X.-A.
Zhao
, C. W.
Omg
, Y. C.
Tsang
, K. F.
Chan
, C. L.
Choy
, P. W.
Chan
, and R. W. M.
Kwok
, Thin Solid Films
322
, 245
(1998
).44.
A.
Wei
, D.
Chen
, N.
Ke
, S.
Peng
, and S. P.
Wong
, Thin Solid Films
323
, 217
(1998
).45.
N.
Tsubouchi
, Y.
Horino
, B.
Enders
, A.
Chayahara
, A.
Kinomura
, and K.
Fujii
, Mater. Chem. Phys.
54
, 325
(1998
).46.
J. M.
Méndez
, A.
Gaona-Cuoto
, E.
Andrade
, J. C.
Pineda
, E. P.
Zavala
, and S.
Muhl
, Nucl. Instrum. Methods Phys. Res. B
136–138
, 231
(1998
).47.
E. J.
Chi
, J. Y.
Shim
, D. J.
Choi
, and H. K.
Baik
, J. Vac. Sci. Technol. B
16
, 1219
(1998
).48.
S. S.
Todorov
, D.
Marton
, K. J.
Boyd
, A. H.
Al-Bayati
, and J. W.
Rabalais
, J. Vac. Sci. Technol. A
12
, 3192
(1994
).49.
50.
51.
52.
C.
Ronning
, H.
Feldermann
, R.
Merk
, H.
Hpfsäss
, P.
Rienke
, and J.-U.
Thiele
, Phys. Rev. B
58
, 2207
(1998
).53.
54.
D.
He
, F.
Zhang
, X.
Zhang
, M.
Zhang
, R.
Liu
, Y.
Xu
, and W.
Wang
, Sci. China, Ser. A
41
, 405
(1998
).55.
D.
Li
, E.
Cutiongco
, Y.-W.
Chung
, M.-S.
Wong
, and W. D.
Sproul
, Diamond Films Technol.
5
, 261
(1995
).56.
57.
H.
Sjöström
, S.
Stafström
, M.
Boman
, and J.-E.
Sundgren
, Phys. Rev. Lett.
75
, 1336
(1995
);H.
Sjöström
, S.
Stafström
, M.
Boman
, and J.-E.
Sundgren
, Phys. Rev. Lett.
76
, 2205
(1996
).58.
H.
Sjöström
, L.
Hultman
, J.-E.
Sundgren
, S. V.
Hainsworth
, T. F.
Page
, and G. S. A. M.
Theunissen
, J. Vac. Sci. Technol. A
14
, 56
(1996
).59.
W. T.
Zheng
, H.
Sjöström
, I.
Ivanov
, K. Z.
Xing
, E.
Broitman
, W. R.
Salaneck
, J. E.
Greene
, and J.-E.
Sundgren
, J. Vac. Sci. Technol. A
14
, 2695
(1996
).60.
E.
Broitman
, W. T.
Zheng
, H.
Sjöström
, I.
Ivanov
, J. E.
Greene
, and J.-E.
Sundgren
, Appl. Phys. Lett.
72
, 2532
(1998
).61.
N.
Hellgren
, M. P.
Johansson
, E.
Broitman
, L.
Hultman
, and J.-E.
Sundgren
, Phys. Rev. B
59
, 5162
(1999
).62.
Ch. Kittel, Introduction in Solid State Physics (Wiley, New York, 1971).
63.
E. Hornbogen and H. Warlimont, Metallkunde (Springer, Berlin, 1996).
64.
A. Kelly and N. H. MacMillan, Strong Solids, 3rd ed. (Clarendon, Oxford, 1986).
65.
K. G. Schmitt-Thomas, Metallkunde für das Maschinenwesen (Springer, Berlin, 1990), Vols. I and II.
66.
67.
H.-H.
Behnke
, Härteri Technische. Mitteilungen
48
, 3
(1993
).68.
P.
Neumaier
, Metalloberfläche
2
, 41
(1989
).69.
70.
71.
72.
A. Niederhofer, P. Nesladek, and S. Vepřek (unpublished).
73.
D. A.
Dietrich
and B.
Rother
, Materialprüfung
37
, 9
(1995
).74.
S. Vepřek, in Hard Ceramic Materials, edited by R. Riedel (Wiley–VCH, Weinhein, in press).
75.
76.
S.
Vepřek
, A.
Niederhofer
, P.
Nesladek
, and F.
Glatz
, Electrochem. Soc. Proc.
97-25
, 317
(1997
).77.
S.
Vepřek
, P.
Nesladek
, A.
Niederhofer
, F.
Glatz
, M.
Jilek
, and M.
Sima
, Surf. Coat. Technol.
108/109
, 138
(1998
).78.
79.
80.
81.
P.
Chantikul
, G. R.
Anstis
, B. R.
Lawn
, and D. B.
Marshall
, J. Am. Ceram. Soc.
64
, 533
(1981
);P.
Chantikul
, G. R.
Anstis
, B. R.
Lawn
, and D. B.
Marshall
, J. Am. Ceram. Soc.
64
, 539
(1981
).82.
A. Niederhofer, K. Moto, P. Nesladek, and S.Vepřek, Phys. Rev. B (submitted).
83.
84.
85.
86.
87.
K.-Th. Wilke and J. Bohm, Kristallzüchtung (Deutsch, Frankfurt/Main, 1988).
88.
N. N. Greenwood and A. Earnshaw, Chemistry of the Elements (Pergamon, Oxford, 1984) German Translation (VCH, Weinheim, 1990).
89.
K. Nassau, Gemstone Enhancement, 2nd ed. (Butterworth-Heineman, Oxford, 1994).
90.
G. B.
Bokii
, N. F.
Kirova
, and V. I.
Nepsha
, Sov. Phys. Dokl.
24
, 83
(1979
).91.
R. H.
Wentorf
, Chem. Eng.
68
, 177
(1961
).92.
93.
94.
95.
W. G. Eversole, U.S. Patent Nos. 3,030,187 and
3,030,188 (1962).
96.
97.
98.
99.
B. V.
Deryagin
, L. L.
Builov
, V. M.
Zubkov
, A. A.
Kochergina
, and D. V.
Fedoseev
, Sov. Phys. Crystallogr.
14
, 449
(1969
).100.
101.
102.
H.
Schmellenmeier
, Exp. Tech. Phys. (Berlin)
1
, 49
(1953
).103.
H.
Schmellenmeier
, Z. Phys. Chem. (Leipzig)
205
, 349
(1956
).104.
105.
106.
E. G.
Spencer
, P. H.
Schmidt
, P. H.
Joy
, and F. J.
Sansalone
, Appl. Phys. Lett.
29
, 118
(1976
).107.
V. E.
Strelnitskii
, I. I.
Aksenov
, S. I.
Vakula
, and V.G.
Padakula
, Sov. Phys. Tech. Phys.
23
, 222
(1978
).108.
109.
110.
A. R.
Patel
and K. A.
Cherian
, Indian J. Pure Appl. Phys.
19
, 803
(1981
).111.
MRS Bull.
23
, 16
(1998
).112.
113.
S.
Ulrich
, J.
Scherer
, J.
Schwan
, I.
Barzen
, K.
Jung
, and H.
Erhard
, Diamond Relat. Mater.
4
, 288
(1995
).114.
M.
Sueda
, T.
Kobayashi
, T.
Rokkaku
, M.
Ogawa
, T.
Watanabe
, and S.
Morimoto
, J. Vac. Sci. Technol. A
16
, 3287
(1998
).115.
116.
117.
S. M. Ojha and L. Holland, Proceedings of the 7th International Vacuum Congress and 3rd International Conference on Solid Surfaces, Vienna, 1977, edited by R. Dobrozemsky, F. Rüdenauer, F. P. Viehböck, and A. Breth (F. Berger & Söhue, Horu, Austria, 1997), p. 1667.
118.
119.
120.
121.
122.
123.
124.
A.
Bubenzer
, B.
Dischler
, G.
Brandt
, and P.
Koidl
, J. Appl. Phys.
54
, 4590
(1983
).125.
126.
127.
128.
129.
130.
131.
A. R. Badzian, T. Niemyski, and E. Olkusnik, in Proceedings of the 3rd International Conference on Chemical Vapor Deposition, (Salt Lake City, April 1972), edited by F. A. Galski, p. 747.
132.
133.
134.
135.
R. A.
Levy
, E.
Mastromatteo
, J. M.
Grow
, V.
Patari
, and V. P.
Kuo
, J. Mater. Res.
10
, 320
(1995
).136.
137.
J.
Löffler
, F.
Steinbach
, J.
Bill
, J.
Mayer
, and F.
Aldinger
, Z. Metallkd.
87
, 170
(1996
).138.
D.
Hegemann
, R.
Riedel
, W.
Dressler
, C.
Oehr
, B.
Schindler
, and H.
Brunner
, Adv. Mater. Chem. Vap. Deposition
3
, 257
(1997
).139.
D.
Hegemann
, R.
Riedel
, and C.
Oehr
, Thin Solid Films
331
, 154
(1999
).140.
D.
Hegemann
, R.
Riedel
, and C.
Oehr
, Adv. Mater., Chem. Vap. Deposition
5
, 61
(1999
).141.
N. N.
Sirota
, M. M.
Zhuk
, A. M.
Mazurenko
, and A. I.
Olekhnovich
, Vesti. Adak. Nauk BSSR, Ser. Fiz.-Mat. Nauk
2
, 111
(1977
);N. N.
Sirota
, M. M.
Zhuk
, A. M.
Mazurenko
, and A. I.
Olekhnovich
, Chem. Abstr.
87
, 59009j
(1977
).142.
A. K.
Butylenko
, G. V.
Samsonov
, I. I.
Timofeeva
, and G.
Makarenko
, Pis'ma Zh. Tekh. Fiz.
3
, 186
(1977
);A. K.
Butylenko
, G. V.
Samsonov
, I. I.
Timofeeva
, and G.
Makarenko
, Chem. Abstr.
86
, 175831z
(1977
).143.
S. Vepřek and M. Jurcik-Rajman, Proceedings of the 7th International Symposium on Plasma Chemistry, edited by J. Timmermans (Eindohoven University of Technology Press, Eindhoven, 1985), p. 90.
144.
145.
S.
Ulrich
, T.
Theel
, J.
Schwan
, and H.
Erhardt
, Surf. Coat. Technol.
97
, 45
(1997
).146.
147.
148.
A.
Inoue
, H. M.
Kimura
, K.
Sasamori
, and T.
Matsumoto
, Japan. Inst. Metals Mater. Trans.
35
, 85
(1994
).149.
150.
A.
Badzian
, T.
Badzian
, W. D.
Drawl
, and R.
Roy
, Diamond Relat. Mater.
7
, 1519
(1998
).151.
O.
Knotek
, R.
Breidenbach
, F.
Jungblut
, and F.
Löffler
, Surf. Coat. Technol.
43/44
, 107
(1990
).152.
O.
Knotek
and F.
Löffler
, J. Hard Mater.
3
, 29
(1992
).153.
154.
H.
Oettel
, R.
Wiedemann
, and S.
Preissler
, Surf. Coat. Technol.
74/75
, 273
(1995
).155.
156.
A. R.
Badzian
, T.
Badzian
, and L.
Pilione
, Int. J. Refract. Met. Hard Mater.
9
, 92
(1990
).157.
158.
T. Y.
Tsui
, G. M.
Pharr
, W. C.
Olivier
, Y. W.
Chung
, E. C.
Cutiongco
, C. S.
Bhatia
, R. L.
White
, R. L.
Rhoades
, and S. M.
Gorbatkin
, Mater. Res. Soc. Symp. Proc.
356
, 767
(1995
).159.
160.
J. M.
Léger
, J.
Haines
, M.
Schmidt
, J. P.
Petitet
, A. S.
Fereira
, and J. A. H.
da Jornada
, Nature (London)
383
, 401
(1996
).161.
162.
163.
U.
Lundin
, L.
Fast
, L.
Nordström
, B.
Johansson
, J. M.
Wills
, and O.
Eriksson
, Phys. Rev. B
57
, 4979
(1998
).164.
E. O.
Hall
, Proc. Phys. Soc. London, Sect.
B64
, 747
(1951
).165.
N. J.
Petch
, J. Iron Steel Inst., London
174
, 25
(1953
).166.
167.
168.
169.
E. M.
Lehockey
, G.
Palumbo
, K. T.
Aust
, U.
Erb
, and P.
Lin
, Scr. Mater.
39
, 341
(1998
).170.
171.
172.
173.
174.
175.
176.
177.
J. E.
Carsley
, J.
Ning
, W. W.
Milligan
, S. A.
Hackney
, and E. C.
Aifantis
, Nanostruct. Mater.
5
, 441
(1995
).178.
179.
180.
181.
182.
G. W.
Nieman
, J. R.
Weertman
, and R. W.
Siegel
, Scr. Metall. Mater.
24
, 145
(1990
).183.
184.
G. E.
Fougere
, J. R.
Weertman
, R. W.
Siegel
, and S.
Kim
, Scr. Metall. Mater.
26
, 1879
(1992
).185.
R. Z.
Valiev
, F.
Chmelik
, F.
Bordeaux
, G.
Kapelski
, and B.
Baudelet
, Scr. Metall. Mater.
27
, 855
(1992
).186.
A. M.
El-Sherik
, U.
Erb
, G.
Palumbo
, and K. T.
Aust
, Scr. Metall. Mater.
27
, 1185
(1992
).187.
P. G.
Sanders
, C. J.
Youngdahl
, and J. R.
Weertman
, Mater. Sci. Eng., A
234
, 77
(1997
).188.
189.
C. J.
Youngdahl
, P. G.
Sanders
, J. A.
Eastman
, and J. R.
Weertman
, Scr. Mater.
37
, 809
(1997
).190.
191.
192.
193.
194.
195.
196.
197.
198.
199.
200.
201.
202.
R. F.
Bunshah
, R.
Nimmagadda
, H. J.
Doerr
, B. A.
Movchan
, N. I.
Grechanuk
, and E. V.
Dabizha
, Thin Solid Films
72
, 261
(1980
).203.
204.
U.
Helmersson
, S.
Todorova
, S. A.
Barnett
, J.-E.
Sundgren
, L. C.
Markert
, and J. E.
Greene
, J. Appl. Phys.
62
, 481
(1987
).205.
206.
X.
Chu
, M. S.
Wong
, W. D.
Sproul
, S. L.
Rohde
, and S. A.
Barnett
, J. Vac. Sci. Technol. A
10
, 1604
(1992
).207.
M.
Larsson
, P.
Hollman
, P.
Hedenqvist
, S.
Hogmark
, U.
Wahlström
, and L.
Hultman
, Surf. Coat. Technol.
86/87
, 351
(1996
).208.
K. M.
Hubbard
, T. R.
Jervis
, P. B.
Mirkarimi
, and S. C.
Barnett
, J. Appl. Phys.
72
, 4466
(1992
).209.
P. B.
Mirkarimi
, L.
Hultman
, and S. A.
Barnett
, Appl. Phys. Lett.
57
, 2654
(1990
).210.
P. B.
Mirkarimi
, S. A.
Barnett
, K. M.
Hubbard
, T. R.
Jervis
, and L.
Hultman
, J. Mater. Res.
9
, 1456
(1994
).211.
J.-E.
Sundgren
, J.
Birch
, G.
Hakansson
, L.
Hultman
, and U.
Helmersson
, Thin Solid Films
193–194
, 818
(1990
).212.
213.
214.
215.
216.
M. L.
Wu
, X. W.
Lin
, V. P.
Dravid
, Y. W.
Chung
, M. S.
Wong
, and W. D.
Sproul
, J. Vac. Sci. Technol. A
15
, 946
(1997
).217.
D.
Li
, X.
Chu
, S. C.
Cheng
, X. W.
Lin
, V. P.
Dravid
, Y. W.
Chung
, M. W.
Wong
, and W. D.
Sproul
, Appl. Phys. Lett.
67
, 203
(1995
).218.
D.
Li
, X. W.
Lin
, S. C.
Cheng
, V. P.
Dravid
, Y. W.
Chung
, M. S.
Wong
, and W. D.
Sproul
, Appl. Phys. Lett.
68
, 1211
(1996
).219.
220.
221.
222.
S. A. Barnett, in Physics of Thin Films, Vol. 17 Mechanics and Dielectric Properties, edited by M. H. Francombe and J. L. Vossen (Academic, Boston, 1993), p. 2.
223.
224.
225.
226.
227.
A.
Madan
, P.
Yashar
, M.
Shinn
, and S. A.
Barnett
, Thin Solid Films
302
, 147
(1997
).228.
229.
A.
Madan
, Y.-Y.
Wang
, S. A.
Barnett
, C.
Enrgstöm
, H.
Ljungcrantz
, L.
Hultman
, and M.
Grimsditch
, J. Appl. Phys.
84
, 776
(1998
).230.
M.
Setoyama
, A.
Nakayama
, T.
Yoshioka
, T.
Nomura
, A.
Shibata
, M.
Chudou
, and H.
Arimoto
, Sumimoto Electr. Ind.
146
, 91
(1995
) (in Japanese).231.
M.
Setoyama
, A.
Nakayama
, M.
Tanaka
, N.
Kitagawa
, and T.
Nomura
, Surf. Coat. Technol.
86/87
, 225
(1996
).232.
L.
Hultman
, G.
Håkansson
, U.
Wahlström
, J.-E.
Sundgren
, I.
Petrov
, F.
Abidi
, and J. E.
Greene
, Thin Solid Films
205
, 153
(1991
).233.
I.
Petrov
, F.
Adibi
, J. E.
Greene
, L.
Hultman
, and J.-E.
Sundgren
, Appl. Phys. Lett.
63
, 36
(1993
).234.
F.
Adibi
, I.
Petrov
, J. E.
Greene
, L.
Hultman
, and J.-E.
Sundgren
, J. Appl. Phys.
73
, 8580
(1993
).235.
M.
Stüber
, V.
Schier
, and H.
Holleck
, Surf. Coat. Technol.
74–75
, 833
(1995
).236.
H.
Holleck
and V.
Schier
, Surf. Coat. Technol.
76–77
, 328
(1995
).237.
238.
239.
S. A. Barnett, TSM Annual Meeting, San Antonio, TX, February 1998 (private communication).
240.
T. L. Selinder, M. E. Sjöstrand, Ä. Östlund, M. Larsson, S. Hogmark, and P. Hedenqvist, Proceedings of the 14th International Plansee Seminar, edited by G. Kneringer, P. Rödhammer, and P. Wilharditz (Plansee AG, Reutte, Austria, 1997), p. 44.
241.
242.
243.
244.
S.
Vepřek
, M.
Haussmann
, and L.
Shizhi
, Electrochemical Soc. Proc.
96-5
, 619
(1996
).245.
S.
Vepřek
, S.
Christiansen
, M.
Albrecht
, and H. P.
Strunk
, Mater. Res. Soc. Symp. Proc.
457
, 407
(1997
).246.
S.
Christiansen
, M.
Albrecht
, H. P.
Strunk
, and S.
Vepřek
, J. Vac. Sci. Technol. B
16
, 19
(1998
).247.
S.
Vepřek
, M.
Haussmann
, and S.
Reiprich
, Mater. Res. Soc. Symp. Proc.
400
, 261
(1996
).248.
249.
W. W.
Milligan
, S. A.
Hackney
, M.
Ke
, and E. C.
Aifantis
, Nanostruct. Mater.
2
, 267
(1993
).250.
251.
G. W. Samsonow, Nitridi (Naukova Dumka, Kiev, 1969) (in Russian).
252.
H. Fischmeister and H. Jehn, Hartstoffschichten zur Verschleissminderung (DGM Informationsgesellschaft, Stuttgart, 1987).
253.
254.
JANAF Thermochemical Tables, 3rd ed., edited by M. W. Chase, C. A. Davies, J. R. Downey, D. J. Fruip, R. A. McDonald, and A. N. Syverud, J. Phys. Chem. Ref. Data 14 (1985).
255.
256.
For the TiN/, similar thermodynamic calculations were also done by
A. G.
Dias
, J. H.
Breda
, P.
Moretto
, and J.
Ordelman
, J. Phys. IV
, 2
, C5
(1995
).257.
T. P.
Mollart
, J.
Haupt
, R.
Gilmore
, and W.
Gissler
, Surf. Coat. Technol.
86/87
, 231
(1996
).258.
P. Holubar, M. Jilek, and M. Sima, 26th International Conference on Metallurgical Coatings and Thin Films, San Diego, April 1999, Surf. Coat. Technol. (in press).
259.
L.
Shizhi
, S.
Yulong
, and P.
Hongrui
, Plasma Chem. Plasma Process.
12
, 287
(1992
).260.
SHM Ltd. Company, Masarykovo Nam. 3, CZ-78701 Sumperk, Czech Republic.
261.
M.
Diserens
, J.
Patscheider
, and F.
Lévy
, Surf. Coat. Technol.
108/109
, 241
(1998
).262.
S. Vepřek, P. Nesladek, A. Niederhofer, H. Männling, and M. Jilek, Surface Engineering: Science and Technology I, edited by A. Kumar, Y.-W. Chung, J. J. Moore, and J. E. Smugeresky (The Minerals, Metals & Materials Society, 1999), p. 219.
263.
A. Niederhofer, P. Nesladek, H.-D. Männing, S. Vepřek, and M. Jilek, International Conference on Metallic Coatings and Thin Films, San Diego, April 1999, Surf. Coatings Technol. (in press).
264.
A. von Engel, Ionized Gases, 2nd ed. (Clarendon, Oxford, 1965).
265.
S. C. Brown, Introduction to Electrical Discharges in Gases (Wiley, New York, 1966).
266.
G. Francis, Ionization Phenomenon in Gases (Butterworth, London, 1960).
267.
S.
Vepřek
, J. Th.
Elmer
, Ch.
Eckmann
, and M.
Jurcik-Rajman
, J. Electrochem. Soc.
136
, 2398
(1987
).268.
S.
Vepřek
, Ch.
Eckmann
, and J. Th.
Elmer
, Plasma Chem. Plasma Process.
8
, 445
(1988
).269.
270.
D.
Hoon
, J. J. S.
Chun
, and J. G.
Kim
, J. Vac. Sci. Technol. A
7
, 31
(1989
).271.
J.
Patscheider
, L.
Shizhi
, and S.
Vep̌rek
, Plasma Chem. Plasma Process.
16
, 341
(1996
).272.
273.
274.
T.
Leyendecker
, O.
Lemmer
, S.
Esser
, and J.
Ebberink
, Surf. Coat. Technol.
48
, 175
(1991
).275.
Y.
Tanaka
, T. M.
Gür
, M.
Kelly
, S. B.
Hagstrom
, T.
Ikeda
, K.
Wakihira
, and H.
Satoh
, J. Vac. Sci. Technol. A
10
, 1749
(1992
).276.
O.
Knotek
, A.
Schrey
, J. W.
Schultze
, and B.
Siemensmeyer
, Werkst. Korros.
43
, 511
(1992
).277.
278.
279.
280.
P.
Hammer
, A.
Steiner
, R.
Villa
, M.
Baker
, P. N.
Gibson
, J.
Haupt
, and W.
Gissler
, Surf. Coat. Technol.
68/69
, 194
(1994
).281.
T. P.
Mollart
, M.
Baker
, J.
Haupt
, A.
Steiner
, P.
Hammer
, and W.
Gissler
, Surf. Coat. Technol.
74/75
, 491
(1995
).282.
P.
Losbichler
, C.
Mitterer
, P. N.
Gibson
, W.
Gissler
, F.
Hofer
, and P.
Warbichler
, Surf. Coat. Technol.
94/95
, 297
(1997
).283.
W.
Gissler
, M. A.
Baker
, J.
Haupt
, P. N.
Gibson
, R.
Gilmore
, and T. P.
Mollart
, Diamond Films Technol.
7
, 165
(1997
).284.
C.
Mitterer
, P.
Losbichler
, F.
Hofer
, P.
Warbichler
, P. N.
Gibson
, and W.
Gisler
, Vacuum
50
, 313
(1998
).285.
286.
R. A.
Andrievski
, I. A.
Anisimova
, and V. P.
Anisimov
, Thin Solid Films
205
, 171
(1991
).287.
288.
289.
M. Jilek, P. Klapetek, and M. Sima, Proceedings of the 14th International Seminar, edited by G. Kneringer, P. Rödhammer, and P. Wilharitz (Plansee AG, Reute, 1997), p. 294.
290.
R. Zallen, The Physics of Amorphous Solids (Wiley, New York, 1983).
291.
H.
Warlimont
and H. P.
Aubauer
, Z. Metallkd.
64
, 484
(1973
).292.
H. P.
Aubauer
and H.
Warlimont
, Z. Metallkd.
65
, 297
(1974
).293.
H. Schmalzried, Chemical Kinetics of Solids (VCH, Weinheim 1995).
294.
H. Schmalzried, Solid State Reactions (Verlag Chemie, Weinheim, 1981).
295.
Diffusion Phenomena in Thin Films and Microelectronic Materials, edited by D. Gupta and P. S. Ho (Noyes, Park Ridge, NJ, 1988), p. 43.
296.
297.
A. L. Greer, in Mechanical Properties and Deformation Behavior of Materials Having Ultra-Fine Microstructures, edited by M. Nastasi, D. M. Parkin, and H. Gleiter (Kluwer Academic, Dordrecht, 1993), p. 53.
298.
H. W.
Sheng
, J.
Xu
, L. G.
Yu
, K. K.
Sun
, Z. Q.
Hu
, and K.
Lu
, J. Mater. Res.
11
, 2841
(1996
).299.
H. W.
Sheng
, G.
Ren
, L. M.
Peng
, Z. Q.
Hu
, and K.
Lu
, J. Mater. Res.
12
, 119
(1997
).300.
301.
T. P.
Mollart
, J.
Haupt
, R.
Gilmore
, and W.
Gissler
, Surf. Coat. Technol.
86/87
, 231
(1996
).302.
L. E. Toth, Transition Metal Carbides and Nitrides (Academic, New York, 1971).
303.
A. F. Wells, Structural Inorganic Chemistry (Clarendon, Oxford, 1984).
304.
305.
O. Knotek (private communication).
306.
307.
308.
309.
310.
311.
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