The determination of the detailed chemical nature of oxidized aluminum species is an essential requirement for the study of many important practical aspects associated with aluminum metal and its compounds. While thick oxidized films of aluminum metal can be easily characterized by x-ray powder diffraction when the films are crystalline, thin amorphous films are very difficult to characterize. In this article, a study of the valence band x-ray photoelectron spectrum of aluminum oxides, hydroxides, and oxyhydroxides is reported using monochromatic aluminum X radiation. The valence band spectra obtained are shown to have significant differences for different oxidized aluminum species, and can be well understood by comparison with spectra generated from cluster and band structure calculations. This study compliments earlier published studies from this research group using achromatic radiation, and demonstrates how the use of monochromatic X radiation allows a more conclusive distinction to be made among oxidized aluminum species.
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July 1999
Papers from the 45th National Symposium of the American Vacuum Society
2-6 November 1998
Baltimore, Maryland (USA)
Research Article|
July 01 1999
Valence band x-ray photoelectron spectroscopic studies to distinguish between oxidized aluminum species
John A. Rotole;
John A. Rotole
Department of Chemistry, Kansas State University, Manhattan, Kansas 66506-3701
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Peter M. A. Sherwood
Peter M. A. Sherwood
Department of Chemistry, Kansas State University, Manhattan, Kansas 66506-3701
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J. Vac. Sci. Technol. A 17, 1091–1096 (1999)
Article history
Received:
November 02 1998
Accepted:
February 08 1999
Citation
John A. Rotole, Peter M. A. Sherwood; Valence band x-ray photoelectron spectroscopic studies to distinguish between oxidized aluminum species. J. Vac. Sci. Technol. A 1 July 1999; 17 (4): 1091–1096. https://doi.org/10.1116/1.581779
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