The microstructure of sputtered alpha platinum dioxide consists of a porous random assembly of platelets. A sweeping motion with very light pressure, by either a sharp or blunt object, leaves a track clearly visible, in reflected light, that stands in contrast to the opaque brown background of the intact film. Microstructural analysis utilizing atomic force microscopy revealed a flattening of the platelets in the affected areas. High reflectivity of the flattened portion is apparently a consequence of the relatively high refractive index of this material. X-ray diffraction by the flattened platelets shows a significant enhancement of the intensity of the 001 reflection corresponding to the alignment of the crystals parallel to the substrate. The work required to flatten the platelets along a microscopic track was deduced from sensitive friction force measurements. Electrical resistivity of the flattened film is moderately lower than that of the intact film. The phenomenon described here might be of importance for data storage or for alignment in lithographic reproduction of multilevel electronic circuits.
Skip Nav Destination
Article navigation
Research Article|
May 01 1999
Optical and mechanical consequences of microstructural alteration of alpha platinum dioxide films Available to Purchase
L. Maya;
L. Maya
Chemical and Analytical Sciences Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6119
Search for other works by this author on:
L. M. Anovitz;
L. M. Anovitz
Chemical and Analytical Sciences Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6119
Search for other works by this author on:
T. Thundat;
T. Thundat
Life Sciences Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831
Search for other works by this author on:
C. S. Yust
C. S. Yust
Consultant, Oak Ridge, Tennessee 37830
Search for other works by this author on:
L. Maya
Chemical and Analytical Sciences Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6119
L. M. Anovitz
Chemical and Analytical Sciences Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6119
T. Thundat
Life Sciences Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831
C. S. Yust
Consultant, Oak Ridge, Tennessee 37830
J. Vac. Sci. Technol. A 17, 1036–1039 (1999)
Article history
Received:
August 13 1998
Accepted:
February 19 1999
Citation
L. Maya, L. M. Anovitz, T. Thundat, C. S. Yust; Optical and mechanical consequences of microstructural alteration of alpha platinum dioxide films. J. Vac. Sci. Technol. A 1 May 1999; 17 (3): 1036–1039. https://doi.org/10.1116/1.581679
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Citing articles via
What more can be done with XPS? Highly informative but underused approaches to XPS data collection and analysis
Donald R. Baer, Merve Taner Camci, et al.
Low-resistivity molybdenum obtained by atomic layer deposition
Kees van der Zouw, Bernhard Y. van der Wel, et al.
Related Content
Characterization of sputtered amorphous platinum dioxide films
J. Appl. Phys. (December 1998)
Electrical Resistance of Alpha Hydrogen‐Palladium
J. Chem. Phys. (March 1962)
Molecular dynamics simulation of crack tip processes in alpha‐iron and copper
J. Appl. Phys. (September 1983)
Surface free energy of TiC layers deposited by electrophoretic deposition (EPD)
AIP Conf. Proc. (January 2018)