Chemical and structural alterations induced at Kapton® surfaces by air exposures following atomic oxygen or 1 keV Ar+ treatments

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Brief Report| March 01 1999

Chemical and structural alterations induced at ${Kapton}^{®}$ surfaces by air exposures following atomic oxygen or 1 keV ${Ar}^{+}$ treatments

John T. Wolan;

John T. Wolan

Department of Chemical Engineering, University of Florida, Gainesville, Florida 32611

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PubMed

Gar B. Hoflund

Department of Chemical Engineering, University of Florida, Gainesville, Florida 32611

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PubMed

J. Vac. Sci. Technol. A 17, 662–664 (1999)

https://doi.org/10.1116/1.582027

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