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© 1999 American Vacuum Society.
1999
American Vacuum Society
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John T. Wolan, Gar B. Hoflund; Chemical and structural alterations induced at surfaces by air exposures following atomic oxygen or 1 keV treatments. J. Vac. Sci. Technol. A 1 March 1999; 17 (2): 662–664. https://doi.org/10.1116/1.582027
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