As parts of targets used in laser–matter interaction experiments, hydrocarbon plasma polymerized coatings of thickness between 100 nm and 30 μm with a smooth surface finish (rms⩽100 nm) are realized. For this work, a mixture of transbutene and hydrogen with the substrate in or out of the discharge is used in a low frequency (2.4 kHz) plasma reactor. The plasma is characterized by emission spectroscopy and mass spectrometry. The best results are obtained in postdischarge conditions: rms=18 nm for 2.6 μm thickness.
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Research Article| September 01 1998
Hydrocarbon plasma polymerized coatings
A. Bénardais, P. Leprince, F. Zielinski, H. Floch; Hydrocarbon plasma polymerized coatings. J. Vac. Sci. Technol. A 1 September 1998; 16 (5): 2840–2844. https://doi.org/10.1116/1.581429
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