Using temperature programmed desorption and high-resolution electron energy loss spectroscopy, we have studied the (partial) decomposition of multilayer NH3 on the hexagonally close packed surface of ruthenium, Ru(001), at 100 K using gas phase atomic hydrogen. Thermal desorption spectra have been collected at various hydrogen atom fluences in order to characterize the evolution of the surface overlayer. At steady-state, the formation of a stable surface overlayer, consisting primarily of NH3, NH, and H, as well as a small concentration of N adatoms, is observed. Thermal desorption spectra, of the steady-state overlayer, show two separate hydrogen desorption peaks. One peak can be assigned to recombinative desorption of hydrogen from the surface while the other is assigned to the reaction-limited decomposition of surface NH groups. Annealing this overlayer to 450 K leaves a relatively high nitrogen adatom surface coverage of θN=0.30.

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