In materials that have bulk inversion symmetry, optical second harmonic generation (SHG) is sensitive to regions where the inversion symmetry is broken, i.e., a surface or interface. We measure SHG from the interface between Si(100) and thin layers of Measurements on a series vicinal samples (0°–5° off axis) show that one- and threefold symmetries in the SHG signal increase with increasing off-axis angle. Comparison to x-ray scattering measurements of the interface roughness, for a set of on-axis samples, demonstrates the sensitivity of SHG to interface roughness.
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