X-ray induced emission of electrons from the ion collectors of Bayard–Alpert gauges has long been recognized as a cause of falsely high readings at low pressures. Less well known is the existence of a reverse x-ray effect leading to a superimposed, but usually smaller, error signal in the opposite direction. First explained by Redhead and others in the 1960s as being caused by photoemission from the gauge envelope, this phenomenon was immediately recognized as potentially useful in cancelling the forward x-ray effect. Although promising experimental results were obtained with special gauge tubes, these early researchers concluded that the cancellation process was too unstable to be of any practical use. We report the results of an attempt to stabilize the cancellation process by the use of identical materials at the two photoemission sites. Experimental Bayard–Alpert gauge tubes were built with gold coatings on the insides of the gauge envelopes and on the surfaces of the ion collectors. The envelope coatings were operated at approximately 15–25 V below the potential of the ion collector. Stable reduction of the x-ray errors by a factor of more than 20 has been demonstrated. Short-term improvements by a factor of 100 have been achieved. Useful improvements have also been observed in sensitivity and in stability at high pressures. Results of long-term stability tests at pressures in the range are described.
Skip Nav Destination
,
Article navigation
May 1998
Papers from the 44th national symposium of the AVS
20-24 Oct 1997
San Jose, California (USA)
Research Article|
May 01 1998
Stable cancellation of x-ray errors in Bayard–Alpert gauges Available to Purchase
B. R. F. Kendall;
B. R. F. Kendall
Elvac Laboratories, Penn Eagle Industrial Park, Bellefonte, Pennsylvania 16823
Search for other works by this author on:
E. Drubetsky
E. Drubetsky
Televac Division of The Fredericks Company, Huntingdon Valley, Pennsylvania 19006
Search for other works by this author on:
B. R. F. Kendall
E. Drubetsky
Elvac Laboratories, Penn Eagle Industrial Park, Bellefonte, Pennsylvania 16823
J. Vac. Sci. Technol. A 16, 1163–1168 (1998)
Article history
Received:
October 13 1997
Accepted:
March 23 1998
Citation
B. R. F. Kendall, E. Drubetsky; Stable cancellation of x-ray errors in Bayard–Alpert gauges. J. Vac. Sci. Technol. A 1 May 1998; 16 (3): 1163–1168. https://doi.org/10.1116/1.581252
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Citing articles via
Perspective on improving the quality of surface and material data analysis in the scientific literature with a focus on x-ray photoelectron spectroscopy (XPS)
George H. Major, Joshua W. Pinder, et al.
Machine-learning-enabled on-the-fly analysis of RHEED patterns during thin film deposition by molecular beam epitaxy
Tiffany C. Kaspar, Sarah Akers, et al.
Low-resistivity molybdenum obtained by atomic layer deposition
Kees van der Zouw, Bernhard Y. van der Wel, et al.
Related Content
Pressure Measurements Below 10−10 Torr with Bayard‐Alpert and Magnetron Gauges
Rev. Sci. Instrum. (September 1963)
Measurement of x‐ray currents in Bayard–Alpert type gauges
J. Vac. Sci. Technol. A (July 1992)
Bayard–Alpert vacuum gauge with microtips
J. Vac. Sci. Technol. B (May 1996)
Stable and reproducible Bayard–Alpert ionization gauge
J. Vac. Sci. Technol. A (March 1994)
Long-term stability of metal-envelope enclosed Bayard–Alpert ionization gauges
J. Vac. Sci. Technol. A (September 2012)