We study experimentally and theoretically stable regimes and discharge disruptions in a helicon plasma source. At fixed input power and gas pressure, stable operation of the source is possible below some critical value of magnetic field The plasma density increases with the magnetic field and reaches a maximum value at after which the discharge disruption occurs. Both and increase almost linearly with the input power and the rate of increase is increasing with the pressure. Matching of the plasma load to the rf power source improves when approaching the disruption point, and becomes perfect at the critical field. The theory of discharge disruptions assumes the power absorption in a helicon source to arise from the linear conversion of helicon waves into electrostatic waves at the plasma edge. The calculated dependence of the absorbed power on the plasma density turns out to be nonmonotonic with minima at antiresonances of the electrostatic wave excitation. This explains qualitatively principal peculiarities of discharge disruptions. The calculated plasma impedance is in agreement with experimental value within a factor of 2.
Skip Nav Destination
Article navigation
November 1997
Research Article|
November 01 1997
Discharge disruptions in a helicon plasma source
K. P. Shamrai;
K. P. Shamrai
Department of Technology, Uppsala University, Box 534, S-751 21 Uppsala, Sweden
Search for other works by this author on:
V. F. Virko;
V. F. Virko
Department of Technology, Uppsala University, Box 534, S-751 21 Uppsala, Sweden
Search for other works by this author on:
H.-O. Blom;
H.-O. Blom
Department of Technology, Uppsala University, Box 534, S-751 21 Uppsala, Sweden
Search for other works by this author on:
V. P. Pavlenko;
V. P. Pavlenko
Department of Technology, Uppsala University, Box 534, S-751 21 Uppsala, Sweden
Search for other works by this author on:
V. B. Taranov;
V. B. Taranov
Department of Technology, Uppsala University, Box 534, S-751 21 Uppsala, Sweden
Search for other works by this author on:
L. B. Jonsson;
L. B. Jonsson
Department of Technology, Uppsala University, Box 534, S-751 21 Uppsala, Sweden
Search for other works by this author on:
C. Hedlund;
C. Hedlund
Department of Technology, Uppsala University, Box 534, S-751 21 Uppsala, Sweden
Search for other works by this author on:
S. Berg
S. Berg
Department of Technology, Uppsala University, Box 534, S-751 21 Uppsala, Sweden
Search for other works by this author on:
J. Vac. Sci. Technol. A 15, 2864–2874 (1997)
Article history
Received:
January 01 1997
Citation
K. P. Shamrai, V. F. Virko, H.-O. Blom, V. P. Pavlenko, V. B. Taranov, L. B. Jonsson, C. Hedlund, S. Berg; Discharge disruptions in a helicon plasma source. J. Vac. Sci. Technol. A 1 November 1997; 15 (6): 2864–2874. https://doi.org/10.1116/1.580841
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Citing articles via
Surface passivation approaches for silicon, germanium, and III–V semiconductors
Roel J. Theeuwes, Wilhelmus M. M. Kessels, et al.
Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering
Faezeh A. F. Lahiji, Samiran Bairagi, et al.
Novel high-efficiency plasma nitriding process utilizing a high power impulse magnetron sputtering discharge
A. P. Ehiasarian, P. Eh. Hovsepian
Related Content
Development and characterization of a helicon plasma source
Rev. Sci. Instrum. (August 2018)
Study of density peaking in a diverging magnetic field helicon experiment
AIP Conference Proceedings (February 2014)
Plasma ionization by annularly bounded helicon waves
Phys. Plasmas (June 2006)
Observation of the inductive to helicon mode transition in a weakly magnetized solenoidal inductive discharge
Appl. Phys. Lett. (October 2008)