Cadmium zinc telluride has been developed as a room temperature radiation detector in recent years. The issue of decreasing surface leakage current, which affects the energy resolution of radiation response, was investigated extensively by various surface oxidation treatments. In this study, an aqueous solution of hydrogen peroxide was used in the oxidation of CdZnTe wafers in order to decrease surface leakage current. The surface chemical composition and its morphology modification due to this oxidation process were investigated. X-ray photoelectron spectroscopy analysis revealed that the main chemical species left after oxidation are along with a small amount of a Cd-related oxide. We found no obvious evidence of the presence of Zn-related oxides. The oxide thickness reaches a saturation after 5 min of oxidation. The atomic force microscopy images revealed that, at this stage of saturation, the surface roughness and the mean diameter of the main features were about 1.3 μm and 97 nm, respectively. The decrease of 37% in the surface leakage current was related to the oxide layers formed by oxidation.
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May 1997
The 43rd national symposium of the American Vacuum Society
14-18 Oct 1996
Philadelphia, Pennsylvania (USA)
Research Article|
May 01 1997
Study of oxidized cadmium zinc telluride surfaces
K.-T. Chen;
K.-T. Chen
Department of Physics, Center for Photonic Materials and Devices, Fisk University, Nashville, Tennessee 37208
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D. T. Shi;
D. T. Shi
Department of Physics, Center for Photonic Materials and Devices, Fisk University, Nashville, Tennessee 37208
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H. Chen;
H. Chen
Department of Physics, Center for Photonic Materials and Devices, Fisk University, Nashville, Tennessee 37208
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B. Granderson;
B. Granderson
Department of Physics, Center for Photonic Materials and Devices, Fisk University, Nashville, Tennessee 37208
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M. A. George;
M. A. George
Department of Physics, Center for Photonic Materials and Devices, Fisk University, Nashville, Tennessee 37208
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W. E. Collins;
W. E. Collins
Department of Physics, Center for Photonic Materials and Devices, Fisk University, Nashville, Tennessee 37208
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A. Burger;
A. Burger
Department of Physics, Center for Photonic Materials and Devices, Fisk University, Nashville, Tennessee 37208
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R. B. James
R. B. James
Advanced Electronics Manufacturing Technologies Department, Sandia National Laboratories, Livermore, California 94550
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K.-T. Chen
D. T. Shi
H. Chen
B. Granderson
M. A. George
W. E. Collins
A. Burger
R. B. James
Department of Physics, Center for Photonic Materials and Devices, Fisk University, Nashville, Tennessee 37208
J. Vac. Sci. Technol. A 15, 850–853 (1997)
Article history
Received:
October 25 1996
Accepted:
February 10 1997
Citation
K.-T. Chen, D. T. Shi, H. Chen, B. Granderson, M. A. George, W. E. Collins, A. Burger, R. B. James; Study of oxidized cadmium zinc telluride surfaces. J. Vac. Sci. Technol. A 1 May 1997; 15 (3): 850–853. https://doi.org/10.1116/1.580719
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