Micromechanical switches and relays realized by a simple surface micromachining process are presented. The devices use a nickel cantilever beam and gold-to-gold electrical contact, and are electrostatically actuated. They have lifetimes exceeding 109 cycles, and a current handling capability of 150 mA.

Topics
Electrical components, Cantilever, Surface micromachining, Transition metals
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© 1997 American Vacuum Society.
1997
American Vacuum Society
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