The formation conditions, structure, and properties of the recently discovered phosphide, Si12P5 (initially assigned Si7P3), have been studied using x-ray diffraction, high-resolution transmission electron microscopy, photospectrometry, and a four-point probe. The phosphide formed in amorphous Si–P alloy thin films with 30, 35 and 44 at. % P after annealing at 1000 °C for 30 min. During annealing at 1100 °C, the phosphide dissociated through P evaporation. The Si12P5 phase is proposed to have rhombohedral symmetry with a P3̄1m space group and a C5W12 structure. The hexagonal lattice parameters measured were a=6.16±0.05 Å and c=13.17±0.01 Å. The optical band gap and the electrical resistivity of the phosphide were determined to be 1.55 eV and 5 mΩ cm, respectively. The Gibbs free energy diagram for the Si–P system was modified to include this new Si12P5 phase.
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March 1997
Research Article|
March 01 1997
A new silicon phosphide, Si12P5: Formation conditions, structure, and properties
J. R. A. Carlsson;
J. R. A. Carlsson
Thin Film Division, Department of Physics, Linköping University, S-581 83 Linköping, Sweden
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L. D. Madsen;
L. D. Madsen
Thin Film Division, Department of Physics, Linköping University, S-581 83 Linköping, Sweden
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M. P. Johansson;
M. P. Johansson
Thin Film Division, Department of Physics, Linköping University, S-581 83 Linköping, Sweden
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L. Hultman;
L. Hultman
Thin Film Division, Department of Physics, Linköping University, S-581 83 Linköping, Sweden
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X.-H. Li;
X.-H. Li
Thin Film Division, Department of Physics, Linköping University, S-581 83 Linköping, Sweden
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H. T. G. Hentzell;
H. T. G. Hentzell
Thin Film Division, Department of Physics, Linköping University, S-581 83 Linköping, Sweden
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L. R. Wallenberg
L. R. Wallenberg
National Center for High Resolution Electron Microscopy, Chemical Center, University of Lund, P.O. Box 124, S-221 00 Lund, Sweden
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J. Vac. Sci. Technol. A 15, 394–401 (1997)
Article history
Received:
July 17 1996
Accepted:
November 15 1996
Citation
J. R. A. Carlsson, L. D. Madsen, M. P. Johansson, L. Hultman, X.-H. Li, H. T. G. Hentzell, L. R. Wallenberg; A new silicon phosphide, Si12P5: Formation conditions, structure, and properties. J. Vac. Sci. Technol. A 1 March 1997; 15 (2): 394–401. https://doi.org/10.1116/1.580497
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