A series of trial tests were carried out to grow BaTiO3 thin films on SrTiO3 substrates in our newly built laser molecular beam epitaxial system. The phase, crystallographic orientation and crystalline quality of the films were investigated by x-ray diffraction /2 scan, symmetric and asymmetric rocking curves scans) and φ scan. The interfacial microstructures of the BaTiO3/SrTiO3 and the surface morphology of BaTiO3 films were analyzed by cross-section transmission electron microscopy and atomic force microscopy. Under appropriate growth conditions, epitaxial, single-crystal films with fully c-axis oriented tetragonal structure were obtained. The tetragonality was calculated by using {303} asymmetric rocking curve for a BaTiO3 thin film to be 1.027, which is larger than the bulk value of BaTiO3. The BaTiO3/SrTiO3 interface is very abrupt with no transitional layer and the BaTiO3 film exhibits an atomically smooth surface.
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March 1997
Research Article|
March 01 1997
Crystallographic and microstructural studies of BaTiO3 thin films grown on SrTiO3 by laser molecular beam epitaxy
Da-Fu Cui;
Da-Fu Cui
Laboratory of Optical Physics, Institute of Physics & Center for Condensed Matter Physics, Chinese Academy of Sciences, Beijing 100080, China
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Hui-Sheng Wang;
Hui-Sheng Wang
Laboratory of Optical Physics, Institute of Physics & Center for Condensed Matter Physics, Chinese Academy of Sciences, Beijing 100080, China
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Zheng-Hao Chen;
Zheng-Hao Chen
Laboratory of Optical Physics, Institute of Physics & Center for Condensed Matter Physics, Chinese Academy of Sciences, Beijing 100080, China
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Yue-Liang Zhou;
Yue-Liang Zhou
Laboratory of Optical Physics, Institute of Physics & Center for Condensed Matter Physics, Chinese Academy of Sciences, Beijing 100080, China
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Hui-Bin Lu;
Hui-Bin Lu
Laboratory of Optical Physics, Institute of Physics & Center for Condensed Matter Physics, Chinese Academy of Sciences, Beijing 100080, China
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Guo-Zhen Yang;
Guo-Zhen Yang
Laboratory of Optical Physics, Institute of Physics & Center for Condensed Matter Physics, Chinese Academy of Sciences, Beijing 100080, China
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Kun Ma;
Kun Ma
National Laboratory of Superconductivity, Institute of Physics & Center for Condensed Matter Physics, Chinese Academy of Sciences, Beijing 100080, China
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Hong Chen;
Hong Chen
National Laboratory of Superconductivity, Institute of Physics & Center for Condensed Matter Physics, Chinese Academy of Sciences, Beijing 100080, China
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Lin Li;
Lin Li
National Laboratory of Superconductivity, Institute of Physics & Center for Condensed Matter Physics, Chinese Academy of Sciences, Beijing 100080, China
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Wei Liu;
Wei Liu
Institute of Physics & Center for Condensed Matter Physics, Chinese Academy of Sciences, Beijing 100080, China
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Yun Zhang
Yun Zhang
Institute of Physics & Center for Condensed Matter Physics, Chinese Academy of Sciences, Beijing 100080, China
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J. Vac. Sci. Technol. A 15, 275–278 (1997)
Article history
Received:
August 16 1996
Accepted:
December 20 1996
Citation
Da-Fu Cui, Hui-Sheng Wang, Zheng-Hao Chen, Yue-Liang Zhou, Hui-Bin Lu, Guo-Zhen Yang, Kun Ma, Hong Chen, Lin Li, Wei Liu, Yun Zhang; Crystallographic and microstructural studies of BaTiO3 thin films grown on SrTiO3 by laser molecular beam epitaxy. J. Vac. Sci. Technol. A 1 March 1997; 15 (2): 275–278. https://doi.org/10.1116/1.580524
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