A versatile, inexpensive, and easy to use module, giving an IBM‐compatible personal computer format of the residual gas analysis spectra obtained by old mass spectrometers, and the associated software are described. The code includes options for postacquisition spectrum processing. With this module, old mass spectrometers can be converted into an efficient computer‐based tool for residual analysis.
© 1996 American Vacuum Society.
1996
American Vacuum Society
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