Earlier works on discharges sustained by electromagnetic surface waves in absence of a magnetic field have revealed the central role played by the power balance per electron. This balance relation stated that, provided energy transport is negligible, the power θL lost by the electron on the average in collisions with heavy particles is exactly compensated under steady‐state conditions by the power θA taken by the electron on the average from the high frequency (hf) field, their common value being the parameter θ. Then, because θL is to a first approximation the same in all hf discharges under given discharge conditions and power density, a simple discharge model valid for all hf plasmas was used. The present article is an extension of this approach to hf magnetized plasmas, using surface‐wave plasma columns placed in an axially directed static magnetic field as a means of investigation. We observe that θ decreases monotonously when increasing the magnetic field intensity B0, showing no extremum at or close to the electron cyclotron resonance frequency match over the gas pressure range (5–100 mTorr) investigated. We show that θ is controlled either by classical ambipolar diffusion or anomalous diffusion, the actual diffusion regime depending on whether the novel parameter B0p (p is gas pressure) is small or large. Our measured θ values are further used to estimate the average electron density in helicon sources given the power density, showing fair agreement with the reported values.
Skip Nav Destination
Article navigation
November 1995
Research Article|
November 01 1995
Power required to maintain an electron in a discharge: Its use as a reference parameter in magnetized high frequency plasmas
J. Margot;
J. Margot
Groupe de Physique des Plasmas, Université de Montréal, Succursale Centre‐ville, Montréal, Québec H3C 3J7, Canada
Search for other works by this author on:
M. Moisan;
M. Moisan
Groupe de Physique des Plasmas, Université de Montréal, Succursale Centre‐ville, Montréal, Québec H3C 3J7, Canada
Search for other works by this author on:
M. Fortin
M. Fortin
Groupe de Physique des Plasmas, Université de Montréal, Succursale Centre‐ville, Montréal, Québec H3C 3J7, Canada
Search for other works by this author on:
J. Vac. Sci. Technol. A 13, 2890–2899 (1995)
Article history
Received:
August 23 1994
Accepted:
July 01 1995
Citation
J. Margot, M. Moisan, M. Fortin; Power required to maintain an electron in a discharge: Its use as a reference parameter in magnetized high frequency plasmas. J. Vac. Sci. Technol. A 1 November 1995; 13 (6): 2890–2899. https://doi.org/10.1116/1.579611
Download citation file:
Sign in
Don't already have an account? Register
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Could not validate captcha. Please try again.
Sign in via your Institution
Sign in via your InstitutionPay-Per-View Access
$40.00
Citing articles via
Related Content
Relation between waveguide and nonwaveguide (half‐space) scattering from a rough interface
J Acoust Soc Am (September 1993)
Fresnel width of the coupling regions of generalized leaky Lamb waves and Fermat’s principle
J Acoust Soc Am (April 1993)
Octahedral spherical hohlraum and its laser arrangement for inertial fusion
Phys. Plasmas (May 2014)
Ray synthesis of backscattering by thin cylindrical shells
J Acoust Soc Am (August 2005)
High-frequency vortex dynamics and losses in the mixed state of nanostructured superconductors with columnar defects
Low Temp. Phys. (September 2023)